Probe with hollow waveguide and method for producing the same
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United States of America Patent
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May 10, 2005
Grant Date -
Feb 28, 2002
app pub date -
Jun 14, 2001
filing date -
Jun 16, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A probe for detecting light or irradiating light comprises a cantilever supported at an end thereof by a substrate, a hollow tip formed at a free end of the cantilever, a microaperture formed at the end of the tip, and a hollow waveguide formed inside the cantilever. A method for producing a probe for light detection or light irradiation which comprises the steps of working a substrate to form a groove therein, forming a flat plate-shaped cover portion on the groove to form a hollow waveguide having an opening in a part thereof, forming a hollow tip having a microaperture on the opening, and removing a part of the substrate by etching, to form a cantilever.
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