Light modulator and method of manufacturing the same
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United States of America Patent
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May 10, 2005
Grant Date -
Aug 28, 2003
app pub date -
Jun 17, 2002
filing date -
Jun 26, 2001
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A method of manufacturing a light modulator in which micromirrors are tilted by an electrostatic force generated by an electrical potential difference between drive electrodes and the micromirrors. The method includes integrally forming support sections disposed at fulcrum points for tilting the micromirrors and axis portions forming axes for tilting the micromirrors.
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