Damped control of a micromechanical device
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United States of America Patent
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May 10, 2005
Grant Date -
Nov 25, 2004
app pub date -
Dec 31, 2003
filing date -
May 20, 2003
priority date (Note) -
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Abstract
Device and method for a damping function to reduce undesirable mechanical transient responses to control signals. In one aspect of the present invention, the damping function may be used to reduce overshoot and oscillation when a digital micromirror is driven from a landing plate to the flat or neutral position. In another aspect of the present invention, the damping function may be used to reduce transient resonance of a digital micromirror when the micromirror is driven to a landing plate.
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