Importance

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Abstract

A tool (10) for vacuum-holding an object, such as an integrated circuit die (20). The tool includes a body portion (16) having a vacuum outlet (16A) for being coupled to a vacuum source. The body portion is coupled to a plurality of tool leg portions (14A, 14B) each having an edge that defines a mating surface (15) for engaging an edge (20A, 20B) of the object. Each mating surface contains at least one vacuum inlet (12) in fluid communication with the vacuum outlet. In one preferred embodiment there are two leg portions providing two mating surfaces that meet at a corner, where the corner defines a 90 degree angle and corresponds to a corner of the integrated circuit die. A corner relief (15A) may be provided to ensure a good mating seal with the die edges. A gasket (18) can be provided to surround the at least one vacuum inlet for ensuring the quality of the vacuum seal. The vacuum inlet is formed by an opening having dimensions that are, preferably but not by way of limitation, less than dimensions of the edge of the die. For example, the vacuum inlet is formed by an elongated slot that has dimensions that are less than the dimensions of the edge of the die. The vacuum-picking tool can be used in a manual or an automated environment. For use the manual environment, the vacuum outlet can be adapted to be coupled to a hand-held tool (30) that is interposed between the vacuum outlet and the vacuum source.

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First Claim