Apparatus and method for depositing thin films on a glass substrate
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United States of America Patent
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May 17, 2005
Grant Date -
Feb 20, 2003
app pub date -
Aug 14, 2002
filing date -
Aug 14, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An in-line sputtering system for depositing a thin film on a substrate includes a buffer heating module, an entry transfer module adjacent to the buffer heating module and having an expedited conveyor device for moving the substrate therein and a first sputtering module for depositing the thin film on the substrate, which is adjacent to the entry transfer module. The entry transfer module serves as a buffer zone which mitigates fluctuations in temperature and pressure in the first sputtering module when the substrate is unloaded from the buffer heating module. The substrate in the entry transfer module is moved by the expedited conveyor device at a speed greater than that in the first sputtering module.
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