Multivariate RBR tool aging detector
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United States of America Patent
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May 17, 2005
Grant Date -
Jun 10, 2004
app pub date -
Dec 6, 2002
filing date -
Dec 6, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A multiple run by run process is described. A plurality of tools and a plurality of products to be run on the tools are provided. Tool effects and product effects on a parameter are identified for each tool and each product. A desired recipe is calculated for each product on each tool based on the tool effects and product effects identified. Thereafter, the plurality of products is run on the plurality of tools. The desired recipe is updated after each run of each tool. Tool aging is calculated after each run of each tool based on the desired recipe used.
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