Electrostatic discharge protection of thin-film resonators
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United States of America Patent
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May 17, 2005
Grant Date -
Feb 5, 2004
app pub date -
Jul 30, 2002
filing date -
Jul 30, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A filter having a thin-film resonator fabricated on a semiconductor substrate and a method of making the same are disclosed. The filter has a bonding pad connected to the resonator and in contact with the substrate to form a Schottky diode with the substrate to protect the resonator from electrostatic discharges.
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