Inspection unit and method of manufacturing substrate
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 17, 2005
Grant Date -
Dec 5, 2002
app pub date -
Sep 25, 2001
filing date -
Sep 25, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The present invention provides an inspection unit capable of allowing a probe and other components to be positioned with a high degree of accuracy while preventing misalignment of the probe and to be arranged closer to each other. The inspection unit includes a probe 14a for supplying an inspection signal in contact with a circuit wiring, and a board 12 having an electrode 13 printed thereon to detect the supplied inspection signal to the circuit wiring in non-contact with the circuit wiring. The board 12 includes a bore 12a allowing the probe 14a to be penetratingly disposed therein. The bore 12a is adapted to guide the axial movement of the probe 14a. A circuit wiring having branch portions branched halfway therefrom can be inspected by using a less number of non-contact sensors.
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