Wafer carrier mapping sensor assembly
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United States of America Patent
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-
May 24, 2005
Grant Date -
N/A
app pub date -
Jul 8, 2002
filing date -
Jul 13, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A wafer mapping sensor assembly includes a housing, and an imaging array positioned therein. Imaging optics are positioned relative to the array to focus an image upon the array. An illumination source is configured to direct illumination toward the wafer, where such illumination is reflected by the wafer. An optical element is interposed between the source and the wafer. The optical element directs the illumination to reduce the effects of undesirable illumination.
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