Devices containing platinum-iridium films and methods of preparing such films and devices
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United States of America Patent
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May 31, 2005
Grant Date -
Mar 11, 2004
app pub date -
Aug 12, 2003
filing date -
Aug 31, 2000
priority date (Note) -
Expired
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Abstract
Methods for forming platinum-iridium films, particularly in the manufacture of a semiconductor device, and devices (e.g., capacitors, integrated circuit devices, and memory cells) containing such films.
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