Needle fixture of a probe card in semiconductor inspection equipment and needle fixing method thereof
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United States of America Patent
Stats
-
May 31, 2005
Grant Date -
Jan 8, 2004
app pub date -
Jul 7, 2003
filing date -
Jul 5, 2002
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A needle fixture of a probe card and a needle fixing method in semiconductor inspection equipment include a needle fixture of a probe card in semiconductor inspection equipment including a printed circuit board; a needle fixture installed in the printed circuit board; a resin unit affixing a probe needle to the needle fixture using an adhesive; and a separation preventer for preventing separation of the resin unit from the needle fixture, wherein the separation preventer includes: a plurality of notches formed along a bottom surface of the needle fixture; and the adhesive filling the plurality of notches.
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