Multi-tilt micromirror systems with concealed hinge structures
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United States of America Patent
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May 31, 2005
Grant Date -
Aug 26, 2004
app pub date -
Feb 24, 2003
filing date -
Feb 24, 2003
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Multi-tilt mirrors, assemblies and applications of the same, and methods of making. Micromirror devices employing a superstructure that includes a mirror supported over a hinge set above substructure. Various features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein to provide miniaturized, highly controllable optics solutions.
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