Semiconductor manufacturing apparatus and its diagnosis apparatus and operating system
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United States of America Patent
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May 31, 2005
Grant Date -
Aug 28, 2003
app pub date -
Feb 27, 2002
filing date -
Feb 27, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A semiconductor manufacturing apparatus allows the user to accurately determine the state of the apparatus and the cause of an abnormal condition for a short time. The apparatus includes a main unit for processing raw materials and forming a semiconductor, recording means for recording information of an operation to be executed by the main unit as predetermined data, operating means for operating the operation of said main unit and simulating the operation by using the predetermined data, and display means located remotely from the main unit and for displaying the simulated result.
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