Method and apparatus for distinguishing between sources of process variation
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United States of America Patent
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May 31, 2005
Grant Date -
N/A
app pub date -
Apr 2, 2001
filing date -
Apr 2, 2001
priority date (Note) -
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Abstract
A method for distinguishing between sources of process variation includes processing a plurality of manufactured items in a process flow; storing a set of production environment data associated with each of the manufactured items; identifying manufactured items associated with a process drift; generating a plurality of characteristic threads based on the production environment data; comparing the characteristic threads for at least those manufactured items associated with the process drift; and determining at least one potential cause for the process drift based on the comparison of the characteristic threads. A manufacturing system for distinguishing between sources of process variation is also provided. The manufacturing system includes a plurality of tools for processing manufactured items in a process flow, a database server, and a drift monitor.
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