US Patent No: 6,901,805

Number of patents in Portfolio can not be more than 2000

Device for measuring the pressure of a fluid

ALSO PUBLISHED AS: 20040045360

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Abstract

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A pressure sensing device for measuring the pressure of a fluid, comprising: a measurement diaphragm which is at least partially made of semiconductor material, is provided with a first surface and a second surface which are exposed respectively to a first pressure and to a second pressure, and undergoes a deformation following the application of the first pressure and of the second pressure; and a resonant element made of semiconductor material which is provided with a first end portion and with a second end portion for mechanically coupling the resonant element to the measurement diaphragm, the oscillation frequency of the resonant element varying according to the deformation to which the measurement diaphragm is subjected; and first circuit means for generating a sensing signal which is indicative of the oscillation frequency of the resonant element. Its particularity consisting of the fact that the resonant element comprises second circuit means for increasing the intensity of the sensing signal which is indicative of the oscillation frequency of the resonant element, the second circuit means being integrated with the structure of the resonant element.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
ABB S.P.A.MILAN117

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Andrea, Moroni Gorla Minore, IT 3 0
Eugenio, Volonterio Appiano Gentile, IT 3 0

Cited Art Landscape

Patent Info (Count) # Cites Year
 
Honeywell Inc. (3)
5,275,055 Resonant gauge with microbeam driven in constant electric field 44 1992
5,417,115 Dielectrically isolated resonant microsensors 38 1993
5,550,516 Integrated resonant microbeam sensor and transistor oscillator 37 1994
 
MURATA MANUFACTURING CO., LTD. (2)
5,869,761 Impact sensor 7 1996
6,053,045 Impact sensor 5 1997
 
ASAHI KOGAKU KOGYO KABUSHIKI KAISHA (1)
5,798,851 Apparatus for correcting scanning position in optical scanner 3 1997
 
AVERY DENNISON CORPORATION (1)
6,706,836 Hydrophilic polymers, pressure sensitive adhesives and coatings 7 2000

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