Importance

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Abstract

There is provided a highly accurate electrical capacitance diaphragm pressure sensor capable of reducing temperature drift that arises when a pressure-travel coefficient changes with temperature variations of a fluid whose pressure is sensed. A sapphire diaphragm pressure sensor, in which sapphire diaphragms are arranged in opposing relation, comprises a pressure sensing element (10, 30) having a pressure receiving part (10A, 30A) with a deposition electrode formed on each of the opposing faces of sapphire diaphragms which are provided in opposing relation to each other and a securing part with a metal deposited on a part of each of the surfaces of the sapphire diaphragms, and further comprises a metal base (11, 31) for securing the pressure sensing element at the securing part of the pressure sensing element, a conductive sealing agent (13, 33) for sealing a gap between the securing part on which a metal is deposited and said metal base, and a nickel protective layer (14, 34) for protecting at least said conductive sealing agent from a medium whose pressure is to be measured.

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First Claim