Method of manufacturing a device

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United States of America Patent

PATENT NO 6902774
APP PUB NO 20040018320A1
SERIAL NO

10202387

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of manufacturing a device includes activating a gas containing at least one of hydrogen and of nitrogen by a hollow cathode discharge and exposing a first surface of a first material to the activated gas, thereby generating at the first surface an enrichment of at least one of hydrogen and of nitrogen and applying a further treatment to the enriched surface.

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Patent Owner(s)

  • INFICON GMBH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nicolussi, Guenther Feldkirch, AT 1 29

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