Dual wavelength method of determining a relative position of a substrate and a template
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United States of America Patent
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Jun 7, 2005
Grant Date -
Oct 21, 2004
app pub date -
May 11, 2004
filing date -
Jul 16, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention includes a method of determining a relative position of a substrate and a template spaced-apart therefrom, the substrate having substrate alignment marks disposed thereon and the template having template alignment marks disposed thereon, the method including, impinging first and second fluxes of light upon the substrate and template alignment marks, with the substrate and template alignment marks being responsive to the first flux of light defining a first response, and being responsive to the second flux of light defining a second response differing from the first response; and processing the first and second responses to form a focused image of the substrate and template alignment marks on a common plane, with the focused image indicating the relative position of the substrate and the template.
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