Micro-mirror device with increased mirror tilt
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United States of America Patent
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Jun 7, 2005
Grant Date -
Aug 19, 2004
app pub date -
Feb 14, 2003
filing date -
Feb 14, 2003
priority date (Note) -
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Abstract
A micro-mirror device includes a substrate, at least one electrode formed on the substrate, and a reflective element spaced from the substrate and extending beyond the at least one electrode. The reflective element is adapted to move between a first position and at least one second position, and, when the reflective element is in the at least one second position, a minimum distance between the reflective element and the at least one electrode is greater than a minimum distance between the reflective element and the substrate.
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