Apparatus and method for the parallel and independent testing of voltage-supplied semiconductor devices
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United States of America Patent
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Jun 7, 2005
Grant Date -
Jul 31, 2003
app pub date -
Jan 27, 2003
filing date -
Jan 25, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus for the parallel and independent testing of a plurality of semiconductor devices disposed on a wafer, in which the semiconductor devices are in each case connected to a common voltage supply unit through a controllable isolating apparatus, a voltage-regulating unit, and a current-limiting unit, and to a method for operating such an apparatus.
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