Probing method and prober
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Jun 14, 2005
Grant Date -
Jul 22, 2004
app pub date -
Sep 16, 2003
filing date -
Mar 16, 2001
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A prober for measuring the electrical characteristics of a test target object includes a tester, stage, probe card, first sensor, second sensor, and controller. The stage places a test target object thereon. The test target object has a plurality of electrical circuit devices on its surface. Each of the electrical circuit devices has a plurality of electrodes on its surface. The probe card is arranged above the stage. The probe has a plurality of probes. The probes are connected to the tester. The first sensor detects the positions of distal ends of the probes. The second sensor detects the surface position of an individual one of the electrical circuit devices. The controller brings the probes of the probe card and the electrodes of the electrical circuit devices into contact with each other.
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