Probe card for electrical testing a chip in a wide temperature range
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United States of America Patent
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Jun 14, 2005
Grant Date -
Jun 24, 2004
app pub date -
Dec 11, 2003
filing date -
Dec 18, 2002
priority date (Note) -
In Force
status (Latency Note)
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Abstract
This disclosure provides a probe card for electrical testing a chip in a wide temperature range. The probe card includes a circuit board, a cover, a circular supporter positioned on the circuit board, at least a probe needle fixed on the circular supporter by an adhesive, and a flow line positioned in the space between the circuit board and the cover. Embodiments of the invention moderates the temperature of the probe card by introducing a fluid such as, for example, forced-air or nitrogen into the flow line to carry heat into or out of the probe card.
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