Signal processing method for in-situ, scanned-beam particle monitoring

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United States of America Patent

PATENT NO 6906799
APP PUB NO 20030076494A1
SERIAL NO

10237458

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Abstract

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A novel method for analyzing the pulse train resulting from a scanned beam particle monitor is described. The method enhances signal-to-noise ratio and significantly reduces particle false alarm rate. Performed in the time domain, the method filters noise pulses that do not occur at the scanner frequency. The analysis further identifies particle-pulse-envelopes (PPE's) by performing a forward-looking and backward-looking autocorrelation. Gaussian fits are subsequently applied to identified particle-pulse envelopes, to determine particle characteristics, such as size and speed.

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Patent Owner(s)

Patent OwnerAddress
INFICON INCTWO TECHNOLOGY PLACE EAST SYRACUSE NY 13057

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bonin, Michel P Danville, CA 4 82
Holve, Donald J Berkeley, CA 4 103
Stibbich, Aaron Livermore, CA 1 3

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