Micro-mechanical device having anti-stiction layer and method of manufacturing the device
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United States of America Patent
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Jun 14, 2005
Issued Date -
N/A
app pub date -
Oct 23, 2003
filing date -
Nov 26, 2001
priority date (Note) -
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Abstract
The micro-mechanical structure includes an anti-stiction layer formed by plasma enhanced chemical vapor deposition and plasma etching. The anti-stiction layer is selectively formed on only the area of a substrate other than the top of a movable structure and a part of an electrode that is subsequently bonded to a wire.
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