Spatial light modulators with light blocking/absorbing areas
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United States of America Patent
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Jun 14, 2005
Grant Date -
May 27, 2004
app pub date -
Nov 26, 2002
filing date -
Dec 7, 2000
priority date (Note) -
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status (Latency Note)
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Abstract
A projection system, a spatial light modulator, and a method for forming a micromirror array such as for a projection display are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micro-mirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers if desired. In one embodiment of the invention, one of the substrates is a light transmissive substrate and a light absorbing layer is provided on the light transmissive substrate to selectively block light from passing through the substrate. The light absorbing layer can form a pattern, such as a frame around an array of micro-mirrors.
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