Micromirror systems with concealed multi-piece hinge structures

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United States of America Patent

PATENT NO 6906848
APP PUB NO 20040165249A1
SERIAL NO

10374574

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Abstract

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Micromirror systems with concealed multi-piece hinge structures are provided for reflective applications. Generally, light is reflected by these structures adapted for three-dimensional tilt as well as up-and-down or out-of-plane actuation. Devices can be produced utilizing the various optional features described herein to provide miniaturized, highly controllable solutions for use in optical switching, projection and other applications, especially optical applications.

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Patent Owner(s)

Patent OwnerAddress
SK HYNIX INCGYEONGGI-DO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aubuchon, Christopher M Palo Alto, CA 11 203

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