System and method for generating and controlling multiple independently steerable laser beam for material processing
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United States of America Patent
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Jun 21, 2005
Grant Date -
Oct 14, 2004
app pub date -
Apr 10, 2003
filing date -
Apr 10, 2003
priority date (Note) -
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Abstract
A laser process system with multiple, independently steerable laser beamlets and including a laser and beam shaper for generating a shaped source beam, a splitter stage for generating a plurality of beamlets from the shaped source beam, a beamlet controller including an independently steerable beamlet steering mirror for and corresponding to each beamlet for independently directing the corresponding beamlet, a mirror controller for controlling each beamlet steering mirror, and an optical path including a scanning lens for directing each steered beamlet to a target area of a workpiece. Each beamlet steering mirror is a multi-axis micro-electro-mechanical mirror and the system further includes a beam dump located in the optical path for intercepting a beamlet steered into the beam dump by the corresponding beamlet steering mirror.
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