Method for diagnosing failure of a manufacturing apparatus and a failure diagnosis system
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United States of America Patent
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Jun 21, 2005
Grant Date -
Aug 7, 2003
app pub date -
Aug 28, 2002
filing date -
Aug 31, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method for diagnosing failure of a manufacturing apparatus, includes: measuring time series data of characteristics of a reference apparatus which conducts same processes as the manufacturing apparatus, and recording the time series data of the characteristics in a system information storage unit as a system information database; reading out a recipe listed in a process control information database recorded in a process control information storage unit; driving and controlling the manufacturing apparatus, measuring time series data of the characteristics as test data, and outputting the test data in real time, in accordance with the recipe; performing calculations on the test data, and creating failure diagnosis data; and diagnosing the failure of the manufacturing apparatus using the failure diagnosis data and the system information database.
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