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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMTED	8 LI-HSIN 6 ROAD HSINCHU SCIENCE PARK HSINCHU 300-77

International Classification(s)

• H01J:ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Benning, Paul	Corvallis, OR	8	69
Chen, Zhizhang	Corvallis, OR	64	1105
Govyadinov, Alexander	Corvallis, OR	233	1137
Liao, Hung	Corvallis, OR	8	294
Ramamoorthi, Sriram	Corvallis, OR	39	205

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
June 28, 2005	US,6911768,B2   US6911768B2	GRANTED PATENT AS SECOND PUBLICATION
May 26, 2005	US,20050110001,A9   US20050110001A9	CORRECTED PATENT APPLICATION
May 15, 2003	US,20030089900,A1   US20030089900A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 6911768

Tunneling emitter with nanohole openings

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