Apparatus and method for electromechanical testing and validation of probe cards
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United States of America Patent
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Jun 28, 2005
Grant Date -
Jan 27, 2005
app pub date -
Jul 1, 2003
filing date -
Jul 1, 2003
priority date (Note) -
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Abstract
A method of testing a probe card includes the step of positioning the probe card in a prober over a verification wafer that is placed on a stage. The probe card is brought in contact with a contact region on the verification wafer. The verification wafer includes a shorting plane surrounding the contact region. A test signal is sent through the verification wafer to the probe card. A response signal from the probe card is received and analyzed.
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