Cryopump piston position tracking

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6912862
APP PUB NO 20040007004A1
SERIAL NO

10615641

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An improved cryogenic compressor with piston position sensing is disclosed. Precision optical encoders using incremental or absolute encoding are incorporated into a compressor to allow for accurate position sensing of moving elements within the compressor. Appropriate electronic circuitry is used to interpret the position data to allow the user modify the frequency and stroke of the piston within the compressor. The invention may be used in systems with multiple compressor pistons or for position data for balance weights or displacers in a cryogenic refrigeration system.

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Patent Owner(s)

Patent OwnerAddress
APROLASE DEVELOPMENT CO LLC2711 CENTERVILLE ROAD SUITE 400 WILMINGTON DE 19808

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sapir, Itzhak Irvine, CA 43 300

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