Methods and apparatus for attaching getters to MEMS device housings
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 5, 2005
Grant Date -
Sep 23, 2004
app pub date -
Mar 20, 2003
filing date -
Mar 20, 2003
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method for reducing occurrences of loose gettering material particles within micro-electromechanical system (MEMS) devices is described. The MEMS devices include a micro-machine within a substantially sealed cavity formed by a housing and a cover for the housing. The cavity containing a getter mounted on a getter substrate which is to be attached to the cover. The method includes providing an area between a portion of the cover and a portion of the getter substrate, positioning the getter within the area, and attaching the getter substrate to the cover.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully