Spatial light modulator with hidden comb actuator
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United States of America Patent
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-
Jul 5, 2005
Grant Date -
Sep 23, 2004
app pub date -
Mar 22, 2003
filing date -
Mar 22, 2003
priority date (Note) -
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Abstract
Described are Micro-Electro-Mechanical Systems (MEMS) actuators with hidden combs and hinges. The ability to hide the combs renders the actuators useful in digital micro-mirror devices. Comb actuators provide increased torque, which facilitates the use of stiffer, less fragile hinge structures. Also important, comb actuators do not require mechanical stops to define stable states, and thus avoid problems associated with physical contact. The actuators are infinitely variable through a range of angles.
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