Lateral microelectromechanical system switch
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United States of America Patent
Stats
-
Jul 12, 2005
Grant Date -
Jul 3, 2003
app pub date -
Dec 31, 2001
filing date -
Dec 31, 2001
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A switch comprising a substrate, an elongated movable part, a pair of electrical contacts disposed at one side of said part, an actuation electrode disposed at the one side of the part and separated from the pair of electrical contacts, wherein the part, the contacts and the electrode are disposed on the substrate, wherein the elongated movable part is arranged and dimensioned such that the part is movable in a generally lateral direction toward the contacts; the movable part includes a central elongated member fixed to a head having an electrical contact disposed at the one side. One end of the movable part is attached to the substrate by means of various anchoring arrangements.
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