Disk coating system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6919001
SERIAL NO

10361308

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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There is described a disk processing and manufacturing equipment in which the processing chambers are stacked on top of each other and in which the disks move through the system on disk carriers which are adjustable to take disks of varying sizes. The disks enter the system through a load zone and are then installed into disk carriers. They move in the carriers sequentially through processing chambers at one level and then move to the other level in a lift or elevator. At this other level, the disks again move sequentially through the system on that level and then exit at an unload zone.

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Patent Owner(s)

Patent OwnerAddress
INTEVAC INC3560 BASSETT STREET SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bluck, Terry Santa Clara County, CA 86 2628
Fairbairn, Kevin P Santa Clara County, CA 23 786
Marion, Craig Alameda County, CA 4 57
Weiss, Robert E San Francisco County, CA 5 84

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