Chemical concentration control device for semiconductor processing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 26, 2005
Grant Date -
May 22, 2003
app pub date -
Nov 12, 2002
filing date -
Nov 19, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A chemical concentration control device for a semiconductor processing apparatus being capable of keeping processing chemicals at constant concentrations, and of maintaining the liquid level required for processing is provided. A semiconductor processing apparatus includes a concentration measuring unit, a drift observation unit, a replenishment quantity calculating unit, a concentration estimating unit, a fixed-quantity replenishment processing unit, and a replenishment control unit for controlling replenishment of chemicals based on the replenishment quantities calculated by the fixed-quantity replenishment processing unit, so that the replenishment quantity calculating unit calculates the replenishment quantities of the respective chemicals with respect to the predetermined reference replenishment quantity based on data measured by the concentration measuring unit and the drift observation unit, and estimated concentration data supplied from the concentration estimating unit.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully