Method of manufacturing a thin film battery
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United States of America Patent
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Jul 26, 2005
Grant Date -
Apr 8, 2004
app pub date -
Aug 12, 2003
filing date -
Sep 7, 2000
priority date (Note) -
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Abstract
In a method of manufacturing a thin film battery in a chamber, a target comprising LiCoO2 is provided on a magnetron cathode in the chamber, and a substrate is placed facing the target. A process gas is introduced into the chamber and the process gas is energized to form a plasma to sputter the target to deposit LiCoO2 on the substrate. An ion flux of from about 0.1 to about 5 mA/cm2 is delivered from the plasma to the substrate to enhance the crystallinity of the deposited LiCoO2 material on the substrate. The process gas is exhausted from the chamber. The target can also be made of other materials.
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