US Patent No: 6,922,272

Number of patents in Portfolio can not be more than 2000

Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices

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Abstract

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A MEMS device such as a grating light valve™ light modulator is athermalized such that the force required to deflect the movable portion of the MEMS device remains constant over a range of temperatures. In MEMS embodiments directed to a grating light valve™ light modulator, a ribbon is suspended over a substrate, and the ribbon tension is kept constant over a temperature range by adjusting the aggregate thermal coefficient of expansion of the ribbon to match the aggregate thermal coefficient of expansion of the substrate. Various opposition materials have an opposite thermal coefficient of expansion as the aluminum layer of a grating light valve™ light modulator ribbon, using the thermal coefficient of expansion of the substrate as a zero coefficient reference. The adjustment of the thermal coefficient of expansion of the ribbon can be performed variously by thickening existing layers of opposition material or adding additional layers of new opposition material to the ribbon, or reducing the aluminum in aluminum layer. The aluminum layer may be reduced variously by reducing the thickness of the aluminum layer, or reducing the surface area that the aluminum covers, or reducing both the surface area and the thickness. Embodiments may combine the reduction of aluminum with the use of opposition materials.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
SILICON LIGHT MACHINES CORPORATIONSUNNYVALE, CA143

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
De, Groot Wilhelmus Palo Alto, CA 3 8
Maheshwari, Dinesh Fremont, CA 67 340

Cited Art Landscape

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (179)
4,418,397 Address decode system 48 1980
4,430,584 Modular input/output system 58 1980
4,447,881 Data processing system integrated circuit having modular memory add-on capacity 67 1980
4,454,591 Interface system for bus line control 60 1980
4,443,845 Memory system having a common interface 115 1980
4,503,494 Non-volatile memory system 114 1980
4,420,717 Use of motor winding as integrator to generate sawtooth for switch mode current regulator 56 1980
4,594,501 Pulse width modulation of printhead voltage 67 1980
4,484,188 Graphics video resolution improvement apparatus 66 1982
4,468,725 Direct AC converter for converting a balanced AC polyphase input to an output voltage 80 1982
4,571,603 Deformable mirror electrostatic printer 366 1984
4,590,548 A.C. supply converter 47 1984
4,566,935 Spatial light modulator and method 512 1984
4,710,732 Spatial light modulator and method 490 1984
4,596,992 Linear spatial light modulator and printer 395 1984
4,615,595 Frame addressed spatial light modulator 396 1984
4,645,881 DC level trip detector 49 1984
4,662,746 Spatial light modulator and method 495 1985
4,811,210 A plurality of optical crossbar switches and exchange switches for parallel processor computer 143 1986
4,728,185 Imaging system 97 1987
4,859,012 Optical interconnection networks 105 1987
4,827,391 Apparatus for implementing output voltage slope in current mode controlled power supplies 57 1988
4,856,863 Optical fiber interconnection network including spatial light modulator 284 1988
4,956,619 Spatial light modulator 581 1988
4,866,488 Ballistic transport filter and device 60 1989
5,079,544 Standard independent digitized video system 348 1989
5,128,660 Pointer for three dimensional display 57 1989
5,072,418 Series maxium/minimum function computing devices, systems and methods 211 1989
5,142,677 Context switching devices, systems and methods 163 1989
5,155,812 Devices and method for generating and using systems, software waitstates on address boundaries in data processing 175 1989
5,028,939 Spatial light modulator system 393 1989
5,040,052 Compact silicon module for high density integrated circuits 77 1989
4,954,789 Spatial light modulator 570 1989
5,037,173 Optical interconnection network 320 1989
5,041,851 Spatial light modulator printer and method of operation 93 1989
5,072,239 Spatial light modulator exposure unit and method of operation 61 1989
5,101,236 Light energy control system and method of operation 67 1989
5,105,369 Printing system exposure module alignment method and apparatus of manufacture 89 1989
5,291,473 Optical storage media light beam positioning system 54 1990
5,018,256 Architecture and process for integrating DMD with control circuit substrates 302 1990
5,083,857 Multi-level deformable mirror device 535 1990
5,142,405 Bistable DMD addressing circuit and method 341 1990
5,061,049 Spatial light modulator and method 735 1990
5,148,157 Spatial light modulator with full complex light modulation capability 120 1990
5,096,279 Spatial light modulator and method 510 1990
5,181,231 Non-volatile counting method and apparatus 60 1990
5,105,207 System and method for achieving gray scale DMD operation 66 1990
5,105,299 Unfolded optics for multiple row deformable mirror device 61 1990
5,151,718 System and method for solid state illumination for DMD devices 91 1990
5,172,161 Unibody printing system and process 54 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 317 1991
5,178,728 Integrated-optic waveguide devices and method 55 1991
5,226,099 Digital micromirror shutter device 370 1991
5,162,787 Apparatus and method for digitized video system utilizing a moving display surface 251 1991
5,170,156 Multi-frequency two dimensional display system 256 1991
5,192,946 Digitized color video display system 326 1991
5,237,340 Replaceable elements for xerographic printing process and method of operation 54 1991
5,214,419 Planarized true three dimensional display 259 1991
5,214,420 Spatial light modulator projection system with random polarity light 300 1991
5,155,778 Optical switch using spatial light modulators 73 1991
5,206,629 Spatial light modulator and memory for digitized video display 252 1991
5,179,274 Method for controlling operation of optical systems and devices 233 1991
5,168,406 Color deformable mirror device and method for manufacture 284 1991
5,240,818 Method for manufacturing a color filter for deformable mirror device 53 1991
5,254,980 DMD display system controller 243 1991
5,255,100 Data formatter with orthogonal input/output and spatial reordering 69 1991
5,307,056 Dynamic memory allocation for frame buffer for spatial light modulator 71 1991
5,142,303 Printing system exposure module optic structure and method of operation 54 1991
5,148,506 Optical crossbar switch 60 1991
5,212,555 Image capture with spatial light modulator and single-cell photosensor 128 1991
5,231,388 Color display system using spatial light modulators 109 1991
5,247,593 Programmable optical crossbar switch 72 1991
5,311,349 Unfolded optics for multiple row spatial light modulators 52 1991
5,202,785 Method and device for steering light 109 1991
5,233,456 Resonant mirror and method of manufacture 305 1991
5,247,180 Stereolithographic apparatus and method of use 107 1991
5,285,407 Memory circuit for spatial light modulator 88 1991
5,216,537 Architecture and process for integrating DMD with control circuit substrates 382 1992
5,331,454 Low reset voltage process for DMD 350 1992
5,296,950 Optical signal free-space conversion board 231 1992
5,212,582 Electrostatically controlled beam steering device and method 347 1992
5,159,485 System and method for uniformity of illumination for tungsten light 64 1992
5,312,513 Methods of forming multiple phase light modulators 279 1992
5,319,789 Electromechanical apparatus having first and second registers enabling both to concurrently receive identical information in one context and disabling one to retain the information in a next context 136 1992
5,172,262 Spatial light modulator and method 389 1992
5,256,869 Free-space optical interconnection using deformable mirror device 76 1992
5,313,479 Speckle-free display system using coherent light 103 1992
5,231,363 Pulse width modulating producing signals centered in each cycle interval 54 1992
5,446,479 Multi-dimensional array video processor system 254 1992
5,272,473 Reduced-speckle display system 289 1992
5,327,286 Real time optical correlation system 276 1992
5,348,619 Metal selective polymer removal 74 1992
5,287,096 Variable luminosity display system 273 1992
5,325,116 Device for writing to and reading from optical storage media 257 1992
5,313,648 Signal processing apparatus having first and second registers enabling both to concurrently receive identical information in one context and disabling one to retain the information in a next context 149 1992
5,319,792 Modem having first and second registers enabling both to concurrently receive identical information in one context and disabling one to retain the information in a next context 134 1992
5,349,687 Speech recognition system having first and second registers enabling both to concurrently receive identical information in one context and disabling one to retain the information in a next context 137 1992
5,285,196 Bistable DMD addressing method 119 1992
5,289,172 Method of mitigating the effects of a defective electromechanical pixel 52 1992
5,280,277 Field updated deformable mirror device 335 1992
5,450,088 Transponder arrangement 96 1992
5,410,315 Group-addressable transponder arrangement 142 1992
5,506,597 Apparatus and method for image projection 286 1992
5,457,566 DMD scanner 244 1992
5,293,511 Package for a semiconductor device 128 1993
5,278,652 DMD architecture and timing for use in a pulse width modulated display system 353 1993
5,435,876 Grid array masking tape process 99 1993
5,455,602 Combined modulation schemes for spatial light modulators 55 1993
5,461,410 Gray scale printing using spatial light modulators 73 1993
5,461,411 Process and architecture for digital micromirror printer 302 1993
5,278,925 Integrated-optic waveguide devices and method 58 1993
5,330,878 Method and apparatus for patterning an imaging member 59 1993
5,452,138 Deformable mirror device with integral color filter 142 1993
5,323,002 Spatial light modulator based optical calibration system 279 1993
5,504,575 SLM spectrometer 138 1993
5,445,559 Wafer-like processing after sawing DMDs 67 1993
5,351,052 Transponder systems for automatic identification purposes 206 1993
5,345,521 Architecture for optical switch 79 1993
5,303,055 Method and apparatus to improve a video signal 59 1993
5,489,952 Method and device for multi-format television 334 1993
5,365,283 Color phase control for projection display using spatial light modulator 287 1993
5,510,824 Spatial light modulator array 113 1993
5,453,778 Method and apparatus for spatial modulation in the cross-process direction 78 1993
5,389,182 Use of a saw frame with tape as a substrate carrier for wafer level backend processing 67 1993
5,448,546 Optical storage media light beam positioning system 55 1993
5,371,543 Monolithic color wheel 112 1993
5,459,492 Method and apparatus for printing stroke and contone data together 65 1993
5,457,493 Digital micro-mirror based image simulation system 329 1993
5,411,769 Method of producing micromechanical devices 264 1993
5,347,321 Color separator for digital television 51 1993
5,339,116 DMD architecture and timing for use in a pulse-width modulated display system 292 1993
5,452,024 DMD display system 424 1993
5,398,071 Film-to-video format detection for digital television 146 1993
5,497,197 System and method for packaging data into video processor 235 1993
5,382,961 Bistable DMD addressing method 112 1993
5,387,924 Method of mitigating the effects of a defective electromechanical pixel 54 1993
5,517,347 Direct view deformable mirror device 307 1993
5,491,510 System and method for simultaneously viewing a scene and an obscured object 148 1993
5,442,411 Displaying video data on a spatial light modulator with line doubling 59 1994
5,499,060 System and method for processing video data 49 1994
5,448,314 Method and apparatus for sequential color imaging 413 1994
5,602,671 Low surface energy passivation layer for micromechanical devices 278 1994
5,412,186 Elimination of sticking of micro-mechanical devices 65 1994
5,444,566 Optimized electronic operation of digital micromirror devices 361 1994
5,447,600 Polymeric coatings for micromechanical devices 93 1994
5,430,524 Unibody printing and copying system and process 53 1994
5,576,878 Use of incompatible materials to eliminate sticking of micro-mechanical devices 55 1994
5,459,528 Video signal processor and method for secondary images 64 1994
5,467,146 Illumination control unit for display system with spatial light modulator 150 1994
5,512,374 PFPE coatings for micro-mechanical devices 89 1994
5,482,818 Method and apparatus for patterning an imaging member 56 1994
5,458,716 Methods for manufacturing a thermally enhanced molded cavity package having a parallel lid 76 1994
5,523,803 DMD architecture and timing for use in a pulse-width modulated display system 285 1994
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 314 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 284 1994
5,482,564 Method of unsticking components of micro-mechanical devices 117 1994
5,499,062 Multiplexed memory timing with block reset and secondary memory 264 1994
5,392,151 Method and apparatus for steering light 88 1994
5,523,878 Self-assembled monolayer coating for micro-mechanical devices 119 1994
5,504,504 Method of reducing the visual impact of defects present in a spatial light modulator display 146 1994
5,485,304 Support posts for micro-mechanical devices 120 1994
5,483,307 Wide field of view head-mounted display 120 1994
5,490,009 Enhanced resolution for digital micro-mirror displays 118 1994
5,519,450 Graphics subsystem for digital television 62 1994
5,516,125 Baffled collet for vacuum pick-up of a semiconductor die 55 1994
5,463,347 MOS uni-directional, differential voltage amplifier capable of amplifying signals having input common-mode voltage beneath voltage of lower supply and integrated circuit substrate 53 1994
5,504,514 System and method for solid state illumination for spatial light modulators 86 1994
5,524,155 Demultiplexer for wavelength-multiplexed optical signal 49 1995
5,508,841 Spatial light modulator based phase contrast image projection system 79 1995
5,481,118 On-chip light sensor 68 1995
5,504,614 Method for fabricating a DMD spatial light modulator with a hardened hinge 113 1995
5,508,750 Encoding data converted from film format for progressive display 84 1995
5,610,438 Micro-mechanical device with non-evaporable getter 298 1995
5,488,431 Video data formatter for a multi-channel digital television system without overlap 66 1995
5,515,076 Multi-dimensional array video processor system 250 1995
5,467,138 Field to frame video pixel data generation 73 1995
5,497,262 Support posts for micro-mechanical devices 97 1995
5,506,171 Method of clean up of a patterned metal layer 54 1995
5,523,881 Optical correlator using light phase modulation and two reflective spatial light modulators 59 1995
 
XEROX CORPORATION (24)
4,348,079 Acousto-optic device utilizing Fresnel zone plate electrode array 51 1980
4,346,965 Light modulator/deflector using acoustic surface waves 42 1980
4,336,982 MgF.sub.2 Coating for promoting adherence of thin films to single crystal materials 43 1980
4,396,246 Integrated electro-optic wave guide modulator 59 1980
4,369,524 Single component transceiver device for linear fiber optical network 45 1980
4,391,490 Interface for proximity coupled electro-optic devices 55 1981
4,400,740 Intensity control for raster output scanners 65 1981
4,483,596 Interface suppression apparatus and method for a linear modulator 45 1982
4,492,435 Multiple array full width electro mechanical modulator 156 1982
4,724,467 Light blocking stop for electro-optic line printers 42 1983
4,538,883 Conformable electrodes for proximity coupled electro-optic devices 42 1983
4,577,933 Gap modulator for high speed scanners 46 1983
4,660,938 Optical display device 51 1985
4,636,039 Nonuniformity of fringe field correction for electro-optic devices 45 1985
4,961,633 VLSI optimized modulator 45 1988
5,251,057 Multiple beam optical modulation system 64 1989
5,251,058 Multiple beam exposure control 57 1989
5,144,472 Electrical contacts for an electro-optic modulator 38 1990
5,103,334 Resolution improvement in flying spot scanner 42 1990
5,112,436 Method of forming planar vacuum microelectronic devices with self aligned anode 40 1990
5,153,770 Total internal reflection electro-optic modulator 89 1991
5,260,718 Liquid crystal shutter xerographic printer with offset configuration lamp aperture and copier/printer with optically aligned lamps, image bars, and lenses 52 1992
5,315,429 Micromechanical light modulator with optically interlaced output 35 1993
5,412,501 System for controlling spot power in a raster output scanner 48 1993
 
SILICON LIGHT MACHINES CORPORATION (21)
* 5,841,579 Flat diffraction grating light valve 182 1995
5,808,797 Method and apparatus for modulating a light beam 326 1996
6,064,404 Bandwidth and frame buffer size reduction in a digital pulse-width-modulated display system 83 1996
5,986,634 Display/monitor with orientation dependent rotatable image 119 1996
5,764,280 Display system including an image generator and movable scanner for same 57 1997
5,982,553 Display device incorporating one-dimensional grating light-valve array 361 1997
6,096,576 Method of producing an electrical interface to an integrated circuit device having high density I/O count 41 1997
6,088,102 Display apparatus including grating light-valve array and interferometric optical system 132 1997
6,004,912 Vapor phase low molecular weight lubricants 84 1998
6,271,808 Stereo head mounted display using a single display device 63 1998
6,101,036 Embossed diffraction grating alone and in combination with changeable image display 69 1998
6,130,770 Electron gun activated grating light valve 73 1998
6,215,579 Method and apparatus for modulating an incident light beam for forming a two-dimensional image 112 1998
6,303,986 Method of and apparatus for sealing an hermetic lid to a semiconductor die 125 1998
6,356,577 Method and apparatus for combining light output from multiple laser diode bars 59 1999
6,251,842 Vapor phase low molecular weight lubricants 47 1999
6,452,260 Electrical interface to integrated circuit device having high density I/O count 42 2000
6,480,634 Image projector including optical fiber which couples laser illumination to light modulator 86 2000
6,466,354 Method and apparatus for interferometric modulation of light 271 2000
6,323,984 Method and apparatus for reducing laser speckle 112 2000
6,387,723 Reduced surface charging in silicon-based devices 42 2001
 
EASTMAN KODAK COMPANY (17)
4,374,397 Light valve devices and electronic imaging/scan apparatus with locationally-interlaced optical addressing 77 1981
4,797,694 Scan-multiplexed light valve printer with band-reducing construction 51 1987
4,801,194 Multiplexed array exposing system having equi-angular scan exposure regions 70 1987
5,521,748 Light modulator with a laser or laser array for exposing image data 134 1994
5,793,519 Micromolded integrated ceramic light reflector 69 1996
5,898,515 Light reflecting micromachined cantilever 66 1996
5,923,475 Laser printer using a fly's eye integrator 101 1996
5,910,856 Integrated hybrid silicon-based micro-reflector 52 1998
6,084,626 Grating modulator array 80 1998
6,061,166 Diffractive light modulator 82 1998
6,038,057 Method and system for actuating electro-mechanical ribbon elements in accordance to a data stream 79 1998
6,144,481 Method and system for actuating electro-mechanical ribbon elements in accordance to a data stream 95 1998
6,172,796 Multilevel electro-mechanical grating device and a method for operating a multilevel mechanical and electro-mechanical grating device 60 1998
* 6,181,458 Mechanical grating device with optical coating and method of making mechanical grating device with optical coating 56 1998
6,252,697 Mechanical grating device 51 1998
6,479,811 Method and system for calibrating a diffractive grating modulator 43 2000
6,384,959 Optical data modulation system with self-damped electromechanical conformal grating 44 2001
 
CANON KABUSHIKI KAISHA (14)
4,714,326 Method and element for optical modulation 86 1985
4,709,995 Ferroelectric display panel and driving method therefor to achieve gray scale 227 1985
4,747,671 Ferroelectric optical modulation device and driving method therefor wherein electrode has delaying function 87 1986
4,856,869 Display element and observation apparatus having the same 83 1987
5,035,473 Display apparatus 92 1989
5,089,903 Display apparatus 83 1989
5,013,141 Liquid crystal light modulation device 92 1989
5,237,435 Multicolor projector employing diffraction grating type liquid crystal light modulators 107 1991
5,363,220 Diffraction device 93 1993
5,299,037 Diffraction grating type liquid crystal display device in viewfinder 69 1993
5,463,497 Illumination device including an optical integrator defining a plurality of secondary light sources and related method 106 1994
5,658,698 Microstructure, process for manufacturing thereof and devices incorporating the same 100 1995
5,734,224 Image forming apparatus and method of manufacturing the same 64 1997
6,016,222 Color image reading apparatus 42 1997
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (13)
4,414,583 Scanned light beam imaging method and apparatus 55 1981
4,422,099 Optical communication on variable power beam 42 1982
4,588,957 Optical pulse compression apparatus and method 60 1982
4,545,610 Method for forming elongated solder connections between a semiconductor device and a supporting substrate 274 1983
4,811,082 High performance integrated circuit packaging structure 349 1986
4,896,948 Simplified double-cavity tunable optical filter using voltage-dependent refractive index 51 1989
5,239,448 Formulation of multichip modules 207 1991
5,210,637 High speed light modulation 48 1991
5,300,813 Refractory metal capped low resistivity metal conductor lines and vias 116 1992
5,296,408 Fabrication method for vacuum microelectronic devices 44 1992
5,523,619 High density memory structure 133 1993
5,517,340 High performance projection display with two light valves 94 1995
5,744,752 Hermetic thin film metallized sealband for SCM and MCM-D modules 61 1995
 
SHARP KABUSHIKI KAISHA (11)
4,443,819 Liquid crystal display screen for use in TV 66 1982
4,859,060 Variable interferometric device and a process for the production of the same 384 1986
5,155,615 Miniature display device for use in a miniature electronic apparatus 58 1989
5,161,042 Color liquid crystal display device using dichroic mirrors for focusing different colors in different directions 152 1991
5,329,289 Data processor with rotatable display 119 1992
5,459,592 Projection display system including a collimating tapered waveguide or lens with the normal to optical axis angle increasing toward the lens center 76 1993
5,392,140 Optical device with two lens arrays with the second array pitch an integral multiple of the first array pitch 99 1993
5,465,175 Autostereoscopic display device 170 1993
6,061,489 Light source and display 70 1995
5,949,390 Three-dimensional display apparatus with a wide viewing angle and increased resolution 53 1996
6,025,859 Electrostatic printer having an array of optical modulating grating valves 50 1996
 
CREO PRODUCTS INC. (9)
4,567,585 Optical tape recorder using linear scanning 62 1983
4,577,932 Multi-spot modulator using a laser diode 74 1984
4,950,890 Method and apparatus for correcting position errors using writable encoders 48 1988
5,107,372 Focus servo actuator for moving lens scanners 41 1989
5,081,617 Optical system for simultaneous reading of multiple data tracks 77 1990
5,177,724 Optical tape recorder using a resonant flexure scanner 48 1991
5,208,818 Laser system for recording data patterns on a planar substrate 70 1991
5,224,088 High resolution optical scanner 62 1992
6,147,789 High speed deformable mirror light valve 70 1998
 
KABUSHIKI KAISHA TOSHIBA (7)
4,807,021 Semiconductor device having stacking structure 293 1987
5,229,597 Image pickup device suitable for dimensional measurement image pickup equipment including a vernier pixel array 40 1991
5,394,303 Semiconductor device 243 1993
5,480,839 Semiconductor device manufacturing method 75 1994
5,461,197 Electronic device having a chip with an external bump terminal equal or smaller than a via hole on a board 64 1994
5,629,566 Flip-chip semiconductor devices having two encapsulants 108 1995
5,995,303 Optical element and optical device 53 1995
 
KODAK GRAPHIC COMMUNICATIONS CANADA COMPANY (7)
4,743,091 Two dimensional laser diode array 116 1986
5,049,901 Light modulator using large area light sources 109 1990
5,132,723 Method and apparatus for exposure control in light valves 91 1991
5,359,451 High efficiency acousto-optic modulator 46 1993
5,420,722 Self-registering microlens for laser diodes 52 1993
5,517,359 Apparatus for imaging light from a laser diode onto a multi-channel linear light valve 119 1995
5,699,740 Method of loading metal printing plates on a vacuum drum 51 1996
 
SONY CORPORATION (7)
4,649,432 Video display system 94 1985
5,486,841 Glasses type display apparatus 108 1993
5,451,103 Projector system 52 1994
5,485,172 Automatic image regulating arrangement for head-mounted image display apparatus 80 1994
5,757,354 Portable data communication apparatus with rotatable display images for accomodating a wireless remote keyboard 122 1995
6,392,309 Semiconductor device including solid state imaging device 46 1996
6,249,381 Illuminating method and illuminating device 116 1999
 
AURA SYSTEMS, INC. (5)
5,150,205 Actuated mirror optical intensity modulation 57 1989
5,126,836 Actuated mirror optical intensity modulation 87 1989
5,185,660 Actuated mirror optical intensity modulation 76 1990
5,085,497 Method for fabricating mirror array for optical projection system 78 1990
5,260,798 Pixel intensity modulator 53 1992
 
FREESCALE SEMICONDUCTOR, INC. (5)
5,147,815 Method for fabricating a multichip semiconductor device having two interdigitated leadframes 161 1991
5,323,051 Semiconductor wafer level package 144 1991
5,313,835 Integrated monolithic gyroscopes/accelerometers with logic circuits 137 1991
* 5,216,278 Semiconductor device having a pad array carrier package 546 1992
5,352,926 Flip chip package and method of making 145 1993
 
INTEL CORPORATION (5)
5,768,009 Light valve target comprising electrostatically-repelled micro-mirrors 95 1997
6,163,026 Chemically stabilized light selective element for imaging applications 42 1998
5,926,309 Light valve target comprising electrostatically-repelled micro-mirrors 93 1998
6,123,985 Method of fabricating a membrane-actuated charge controlled mirror (CCM) 94 1998
6,346,430 Packaged integrated processor and spatial light modulator 43 2000
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (5)
4,389,096 Image display apparatus of liquid crystal valve projection type 280 1981
5,299,289 Polymer dispersed liquid crystal panel with diffraction grating 133 1992
5,510,758 Multilayer microstrip wiring board with a semiconductor device mounted thereon via bumps 161 1994
5,920,418 Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator 116 1995
5,949,570 Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator 69 1997
 
REFLECTION TECHNOLOGY, INC. (5)
5,009,473 Low vibration resonant scanning unit for miniature optical display apparatus 61 1989
5,136,695 Apparatus and method for updating a remote video display from a host computer 68 1989
D334742 Miniature video display 48 1990
D337320 Combined display and headband for miniature video display unit 88 1990
D334557 Combined headband and attachment arm for a miniature video display box 83 1990
 
REVEO, INC. (5)
5,121,343 3-D stereo computer output printer 80 1990
5,165,013 3-D stereo pen plotter 67 1990
5,221,982 Polarizing wavelength separator 168 1991
5,245,686 Method of fabricating an image plane translator device and apparatus incorporating such device 51 1991
5,502,481 Desktop-based projection display system for stereoscopic viewing of displayed imagery over a wide field of view 124 1994
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (5)
5,311,360 Method and apparatus for modulating a light beam 576 1992
5,459,610 Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 308 1993
5,677,783 Method of making a deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 102 1995
6,219,015 Method and apparatus for using an array of grating light valves to produce multicolor optical images 84 1996
6,154,305 Miniature scanning confocal microscope 64 1999
 
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (5)
4,896,325 Multi-section tunable laser with differing multi-element mirrors 145 1988
5,233,460 Method and means for reducing speckle in coherent laser pulses 95 1992
5,493,177 Sealed micromachined vacuum and gas filled devices 133 1993
5,726,480 Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same 269 1995
6,210,988 Polycrystalline silicon germanium films for forming micro-electromechanical systems 213 2000
 
CITIZEN WATCH CO., LTD. (4)
4,561,044 Lighting device for a display panel of an electronic device 70 1984
4,663,670 Television receiver having a liquid crystal display device 57 1984
4,652,932 Liquid crystal display television receiver 78 1985
4,646,158 Liquid crystal television receiver 84 1985
 
ECHELLE, INC. (4)
5,629,801 Diffraction grating light doubling collection system 81 1995
* 5,661,592 Method of making and an apparatus for a flat diffraction grating light valve 235 1995
5,798,743 Clear-behind matrix addressing for display systems 72 1995
5,731,802 Time-interleaved bit-plane, pulse-width-modulation digital display system 108 1996
 
HITACHI, LTD. (4)
* 4,556,899 Insulated type semiconductor devices 22 1982
5,119,204 Liquid crystal television set having driving circuit on peripheral portion and method of fabrication of image display section 93 1989
4,970,575 Semiconductor device 81 1990
5,868,854 Method and apparatus for processing samples 52 1992
 
Hughes Aircraft Company (4)
4,817,850 Repairable flip-chip bumping 68 1988
5,031,144 Ferroelectric memory with non-destructive readout including grid electrode between top and bottom electrodes 65 1990
5,426,072 Process of manufacturing a three dimensional integrated circuit from stacked SOI wafers using a temporary silicon substrate 262 1993
5,523,628 Apparatus and method for protecting metal bumped integrated circuit chips during processing and for providing mechanical support to interconnected chips 173 1994
 
KOPIN CORPORATION (4)
5,258,325 Method for manufacturing a semiconductor device using a circuit transfer film 199 1992
5,713,652 Slide projector mountable light valve display 57 1994
5,815,126 Monocular portable communication and display system 176 1996
6,097,352 Color sequential display panels 175 1997
 
LSI LOGIC CORPORATION (4)
5,340,772 Method of increasing the layout efficiency of dies on a wafer and increasing the ratio of I/O area to active area per die 57 1992
5,399,898 Multi-chip semiconductor arrangements using flip chip dies 374 1992
5,438,477 Die-attach technique for flip-chip style mounting of semiconductor dies 159 1993
6,396,789 Data storage system and methods using diffractive near-field optics 47 1998
 
LUCENT TECHNOLOGIES INC. (4)
5,689,361 Apparatus and method for femtosecond pulse compression based on selective attenuation of a portion of an input power spectrum 79 1996
5,745,271 Attenuation device for wavelength multiplexed optical fiber communications 134 1996
5,912,094 Method and apparatus for making a micro device 53 1997
6,356,689 Article comprising an optical cavity 71 2000
 
MOTOROLA, INC. (4)
4,700,276 Ultra high density pad array chip carrier 87 1986
5,115,344 Tunable diffraction grating 63 1990
5,157,304 Field emission device display with vacuum seal 70 1990
5,486,946 Integrated electro-optic package for reflective spatial light modulators 87 1994
 
NEC CORPORATION (4)
4,751,509 Light valve for use in a color display unit with a diffraction grating assembly included in the valve 85 1986
5,534,883 Video signal interface 148 1993
5,508,561 Apparatus for forming a double-bump structure used for flip-chip mounting 168 1994
5,841,929 Light wavelength filtering circuit and manufacturing method thereof 40 1996
 
SANDIA CORPORATION (4)
5,919,548 Chemical-mechanical polishing of recessed microelectromechanical devices 158 1997
5,963,788 Method for integrating microelectromechanical devices with electronic circuitry 174 1997
6,012,336 Capacitance pressure sensor 113 1998
6,290,859 Tungsten coating for improved wear resistance and reliability of microelectromechanical devices 49 1999
 
SEIKO EPSON CORPORATION (4)
4,636,866 Personal liquid crystal image display 164 1983
5,453,803 Low profile liquid crystal projector and method of using same 54 1994
5,704,700 Laser illuminated image projection system and method of using same 97 1995
6,569,717 Semiconductor device production method, electro-optical device production method, semiconductor device, and electro-optical device 62 2000
 
VENTURE LENDING & LEASING IV, INC. (4)
5,835,256 Reflective spatial light modulator with encapsulated micro-mechanical elements 348 1996
6,046,840 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 329 1998
6,290,864 Fluoride gas etching of silicon with improved selectivity 79 1999
6,172,797 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 176 1999
 
3M INNOVATIVE PROPERTIES COMPANY (3)
6,163,402 Rear projection screen 73 1998
6,310,018 Fluorinated solvent compositions containing hydrogen fluoride 61 2000
6,438,954 Multi-directional thermal actuator 85 2001
 
Bell Telephone Laboratories, Incorporated (3)
4,327,966 Variable attenuator for laser radiation 58 1980
4,327,411 High capacity elastic store having continuously variable delay 58 1980
4,717,066 Method of bonding conductors to semiconductor devices 129 1986
 
CALIFORNIA INSTITUTE OF TECHNOLOGY (3)
5,206,829 Thin film ferroelectric electro-optic memory 35 1990
5,832,148 Electrically controlled wavelength multiplexing waveguide filter 74 1996
6,069,392 Microbellows actuator 85 1998
 
CASIO COMPUTER CO., LTD. (3)
4,809,078 Liquid crystal television receiver 86 1984
4,722,593 Liquid-crystal projector with light beam reduction lens array for improved brightness of image outer portions 99 1986
4,803,560 Liquid-crystal television receiver with cassette tape recorder 61 1987
 
DELPHI TECHNOLOGIES, INC. (3)
5,221,400 Method of making a microaccelerometer having low stress bonds and means for preventing excessive z-axis deflection 47 1990
5,220,200 Provision of substrate pillars to maintain chip standoff 95 1991
5,427,975 Method of micromachining an integrated sensor on the surface of a silicon wafer 112 1993
 
FUJI PHOTO FILM CO., LTD. (3)
5,216,544 Beam-combining laser beam source device 45 1992
6,327,071 Drive methods of array-type light modulation element and flat-panel display 261 1999
6,195,196 Array-type exposing device and flat type display incorporating light modulator and driving method thereof 325 1999
 
GENERAL ELECTRIC COMPANY (3)
4,558,171 Hermetic enclosure for electronic components with an optionally transparent cover and a method of making the same 61 1984
4,687,326 Integrated range and luminance camera 104 1985
5,367,585 Integrated microelectromechanical polymeric photonic switch 84 1993
 
GENERAL MOTORS CORPORATION (3)
4,893,509 Method and product for fabricating a resonant-bridge microaccelerometer 113 1988
5,233,874 Active microaccelerometer 86 1991
5,953,161 Infra-red imaging system using a diffraction grating array 60 1998
 
Honeywell Inc. (3)
5,113,285 Full color three-dimensional flat panel display 129 1990
5,418,584 Retroreflective array virtual image projection screen 112 1992
5,895,233 Integrated silicon vacuum micropackage for infrared devices 134 1997
 
JDS UNIPHASE CORPORATION (3)
5,168,401 Brightness conserving optical system for modifying beam symmetry 99 1991
5,920,411 Optical multiplexing/demultiplexing device 67 1997
6,122,299 Angled distributed reflector optical device with enhanced light confinement 61 1997
 
MICROVISION, INC. (3)
4,934,773 Miniature video display system 275 1987
5,023,905 Pocket data receiver with full page visual display 94 1988
5,048,077 Telephone handset with full-page visual display 139 1988
 
NATIONAL SEMICONDUCTOR CORPORATION (3)
4,355,463 Process for hermetically encapsulating semiconductor devices 118 1980
4,882,683 Cellular addressing permutation bit map raster graphics architecture 82 1987
6,313,901 Liquid crystal display fabrication process using a final rapid thermal anneal 30 1999
 
PACEMATCH PROPERTIES LLC (3)
6,222,954 Fault-tolerant fiber-optical beam control modules 102 1999
6,525,863 Multi-technology multi-beam-former platform for robust fiber-optical beam control modules 59 2000
6,563,974 High resolution fault-tolerant fiber-optical beam control modules 44 2001
 
QUALCOMM MEMS TECHNOLOGIES, INC. (3)
5,835,255 Visible spectrum modulator arrays 516 1994
5,986,796 Visible spectrum modulator arrays 496 1996
6,055,090 Interferometric modulation 459 1999
 
RAYTHEON COMPANY (3)
5,024,494 Focussed light source pointer for three dimensional display 71 1990
5,450,219 Raster following telecentric illumination scanning system for enhancing light throughout in light valve projection systems 62 1993
5,668,611 Full color sequential image projection system incorporating pulse rate modulated illumination 114 1995
 
SIEMENS AKTIENGESELLSCHAFT (3)
4,417,386 Method for mounting a semiconductor device in a housing 45 1980
4,804,641 Method for limiting chippage when sawing a semiconductor wafer 63 1986
5,808,323 Microoptical device with mirrors 66 1996
 
The United States of America as represented by the Secretary of the Air Force (3)
4,511,220 Laser target speckle eliminator 98 1982
4,649,085 Cryogenic glass-to-metal seal 53 1984
4,698,602 Micromirror spatial light modulator 91 1985
 
The United States of America as represented by the Secretary of the Navy (3)
4,623,219 Real-time high-resolution 3-D large-screen display using laser-activated liquid crystal light valves 74 1985
5,208,891 Fiber-optic viewgraph projector 43 1991
5,230,005 Electronic tuning of a broadband laser 48 1991
 
TOPPAN PRINTING CO., LTD. (3)
5,058,992 Method for producing a display with a diffraction grating pattern and a display produced by the method 77 1988
5,132,812 Method of manufacturing display having diffraction grating patterns 60 1990
5,301,062 Display having diffraction grating pattern 66 1992
 
U.S. PHILIPS CORPORATION (3)
4,915,479 Liquid crystal display illumination system 130 1987
5,060,058 Modulation system for projection display 66 1989
5,442,414 High contrast illumination system for video projector 142 1994
 
ADVANCED MICRO DEVICES, INC. (2)
6,300,148 Semiconductor structure with a backside protective layer and backside probes and a method for constructing the structure 42 1998
6,274,469 Process using a plug as a mask for a gate 41 2000
 
BALL SEMICONDUCTOR, INC. (2)
6,271,145 Method for making a micromachine 50 1999
6,197,610 Method of making small gaps for small electrical/mechanical devices 67 2000
 
DAEWOO ELECTRONICS CO., LTD. (2)
5,469,302 Electrostrictive mirror actuator for use in optical projection system 89 1994
5,506,720 Method for manufacturing an electrodisplacive actuated mirror array 64 1994
 
DENSO CORPORATION (2)
5,554,304 Process for producing a micromotion mechanical structure 62 1995
5,825,443 Color liquid crystal display with three dichroic mirrors reflecting in different directions to three pixels which reflect to common optics 45 1997
 
ENERGY, UNITED STATES DEPARTMENT OF (2)
4,915,463 Multilayer diffraction grating 99 1988
4,963,012 Passivation coating for flexible substrate mirrors 77 1988
 
FLORIDA ATLANTIC UNIVERSITY (2)
5,231,432 Projector utilizing liquid crystal light-valve and color selection by diffraction 86 1991
5,303,043 Projection television display utilizing Bragg diffraction cell for producing horizontal scan 46 1992
 
FUJITSU LIMITED (2)
4,824,200 Optical branching filter 76 1987
5,475,236 Semiconductor chip for mounting on a semiconductor package substrate by a flip-clip process 147 1995
 
FUJITSU SEMICONDUCTOR LIMITED (2)
5,519,251 Semiconductor device and method of producing the same 97 1993
5,508,565 Semiconductor device having a plurality of chips having identical circuit arrangement sealed in package 122 1994
 
HEWLETT-PACKARD COMPANY (2)
4,949,148 Self-aligning integrated circuit assembly 101 1989
5,189,505 Flexible attachment flip-chip assembly 121 1991
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (2)
5,508,558 High density, high speed, semiconductor interconnect using-multilayer flexible substrate with unsupported central portion 42 1993
2001/0019,454 Projection lens and system 48 2001
 
InterScience, Inc. (2)
5,999,319 Reconfigurable compound diffraction grating 86 1998
6,282,213 Tunable diode laser with fast digital line selection 73 1998
 
JAPAN AVIATION ELECTRONICS INDUSTRY, LIMITED (2)
5,043,917 Control method and apparatus therefor 51 1989
5,185,823 Waveguide type optical device 39 1991
 
KULITE SEMICONDUCTOR PRODUCTS, INC. (2)
5,455,445 Multi-level semiconductor structures having environmentally isolated elements 120 1994
5,955,771 Sensors for use in high vibrational applications and methods for fabricating same 107 1997
 
L-3 COMMUNICATIONS CORPORATION (2)
5,486,698 Thermal imaging system with integrated thermal chopper 88 1994
5,512,748 Thermal imaging system with a monolithic focal plane array and method 92 1994
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (2)
5,310,624 Integrated circuit micro-fabrication using dry lithographic processes 59 1992
5,742,373 Color microdisplays and methods of manufacturing same 57 1995
 
MITSUBISHI DENKI KABUSHIKI KAISHA (2)
* 4,561,011 Dimensionally stable semiconductor device 90 1983
5,093,281 method for manufacturing semiconductor devices 48 1989
 
MIYAKAWA CORPORATION (2)
5,461,547 Flat panel display lighting system 119 1993
5,485,354 Flat panel display lighting system 137 1993
 
NEOPHOTONICS CORPORATION (2)
6,268,952 Micromechanical light steering optical switch 91 1999
6,169,624 Achromatic optical modulators 58 1999
 
Optron Systems, Inc. (2)
5,287,215 Membrane light modulation systems 177 1991
5,471,341 Membrane light modulating systems 167 1993
 
OVD KINEGRAM AG (2)
4,761,253 Method and apparatus for producing a relief pattern with a microscopic structure, in particular having an optical diffraction effect 80 1987
5,101,184 Diffraction element and optical machine-reading device 108 1989
 
Raychem Corporation (2)
5,113,272 Three dimensional semiconductor display using liquid crystal 124 1990
5,307,185 Liquid crystal projection display with complementary color dye added to longest wavelength imaging element 58 1992
 
RESEARCH TRIANGLE INSTITUTE (2)
6,057,520 Arc resistant high voltage micromachined electrostatic switch 122 1999
6,229,683 High voltage micromachined electrostatic switch 106 1999
 
ROCKWELL INTERNATIONAL CORPORATION (2)
5,198,895 Holographic head-up display 50 1991
5,315,423 Wavelength multiplexed two dimensional image transmission through single mode optical fiber 71 1992
 
ROYAL BANK CAPITAL PARTNERS (2)
5,673,139 Microelectromechanical television scanning device and method for making the same 317 1993
5,914,801 Microelectromechanical devices including rotating plates and related methods 138 1996
 
SAMSUNG ELECTRONICS CO., LTD. (2)
5,066,614 Method of manufacturing a leadframe having conductive elements preformed with solder bumps 89 1990
* 5,552,635 High thermal emissive semiconductor device package 155 1995
 
SANDIA NATIONAL LABORATORIES (2)
6,096,656 Formation of microchannels from low-temperature plasma-deposited silicon oxynitride 155 1999
2002/0105,725 Electrically-programmable optical processor with enhanced resolution 71 2000
 
SNAP-TITE TECHNOLOGIES, INC. (2)
5,377,705 Precision cleaning system 134 1993
5,526,834 Apparatus for supercritical cleaning 79 1994
 
Sperry Corporation (2)
4,398,798 Image rotating diffraction grating 64 1980
4,435,041 Chromatic aberration correction in a multiwavelength light beam deflection system 61 1982
 
STOVOKOR TECHNOLOGY LLC (2)
4,926,241 Flip substrate for chip mount 146 1988
5,039,628 Flip substrate for chip mount 78 1990
 
SUMITOMO ELECTRIC INDUSTRIES, LTD. (2)
5,214,308 Substrate for packaging a semiconductor device 232 1991
5,298,460 Substrate for packaging a semiconductor device 43 1992
 
The Charles Stark Draper Laboratory, Inc. (2)
5,126,812 Monolithic micromechanical accelerometer 104 1990
5,837,562 Process for bonding a shell to a substrate for packaging a semiconductor 115 1995
 
The Nippon Signal Co., Ltd. (2)
5,606,447 Planar type mirror galvanometer and method of manufacture 139 1995
5,912,608 Planar type electromagnetic actuator 99 1997
 
The United States of America as represented by the Secretary of the Army (2)
4,361,384 High luminance miniature display 122 1980
5,319,214 Infrared image projector utilizing a deformable mirror device spatial light modulator 76 1992
 
THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL (2)
5,170,269 Programmable optical interconnect system 78 1991
5,370,742 Liquid/supercritical cleaning with decreased polymer damage 98 1992
 
UNITED TECHNOLOGIES CORPORATION (2)
4,426,768 Ultra-thin microelectronic pressure sensors 64 1981
4,440,839 Method of forming laser diffraction grating for beam sampling device 70 1983
 
ADVANCED OPTICAL TECHNOLOGIES, INC. (1)
6,115,168 Integrated optical retroreflecting modulator 44 1998
 
ADVANCED TECHNOLOGY MATERIALS, INC. (1)
5,320,709 Method for selective removal of organometallic and organosilicon residues and damaged oxides using anhydrous ammonium fluoride solution 81 1993
 
AERODYNE PRODUCTS CORPORATION, A CORP. OF MA. (1)
4,655,539 Hologram writing apparatus and method 66 1984
 
AGENCIA DE PATENTES DE PANAMA (1)
4,952,925 Projectable passive liquid-crystal flat screen information centers 61 1988
 
AGFA CORPORATION (1)
6,229,650 Optical imaging head having a multiple writing bean source 60 1999
 
AGILENT TECHNOLOGIES, INC. (1)
6,075,632 Optical noise monitor 49 1997
 
AK Technology, Inc. (1)
5,239,806 Thermoplastic semiconductor package and method of producing it 53 1992
 
ALPS ELECTRIC CO., LTD. (1)
5,847,859 Optical reading device 60 1996
 
ANALOG DEVICES, INC. (1)
5,694,740 Micromachined device packaged to reduce stiction 81 1996
 
APPLIED MATERIALS, INC. (1)
6,286,231 Method and apparatus for high-pressure wafer processing and drying 97 2000
 
ASAHI GLASS COMPANY, LIMITED (1)
5,798,805 Projection type display apparatus 68 1995
 
Ascom Tech Ltd. (1)
5,508,840 Light modulator 52 1993
 
ASULAB S.A. (1)
6,040,748 Magnetic microswitch 58 1998
 
AT&T CORP. (1)
5,500,761 Micromechanical modulator 339 1994
 
AT&T IPM CORP. (1)
5,473,512 Electronic device package having electronic device boonded, at a localized region thereof, to circuit board 111 1994
 
ATMEL CORPORATION (1)
5,137,836 Method of manufacturing a repairable multi-chip module 114 1991
 
BAE SYSTEMS ELECTRONICS LIMITED (1)
5,192,864 Two dimensional display produced by one dimensional scanned emitters 48 1991
 
BREED AUTOMOTIVE TECHNOLOGY, INC. (1)
4,930,043 Closed-loop capacitive accelerometer with spring constraint 65 1989
 
BRIGHT & MORNING STAR COMPANY, THE, A CA. LIMITED PARTNERSHIP (1)
4,772,094 Optical stereoscopic system and prism window 145 1985
 
BRITEVIEW TECHNOLOGIES, INC. (1)
5,371,618 Color liquid crystal display employing dual cells driven with an EXCLUSIVE OR relationship 174 1993
 
CARVER PUMP COMPANY, A CORP. OF DE (1)
4,902,083 Low vibration resonant scanning unit for miniature optical display apparatus 149 1988
 
CERPROBE CORPORATION (1)
5,285,105 Semiconductor die packages having lead support frame 49 1992
 
CHEETAH OMNI, LLC (1)
6,445,502 Variable blazed grating 62 2001
 
CITIZEN FINETECH MIYOTA CO., LTD. (1)
5,347,378 Fast switching color filters for frame-sequential video using ferroelectric liquid crystal color-selective filters 131 1993
 
COHERENT, INC. (1)
4,711,526 Attenuating beam splitter 46 1986
 
COMMISSARIAT A L'ENERGIE ATOMIQUE (1)
5,391,881 Ionizing radiation imaging device 54 1993
 
COMSAT CORPORATION (1)
4,797,918 Subscription control for television programming 58 1987
 
CORNELL UNIVERSITY (1)
5,439,731 Interconnect structures containing blocked segments to minimize stress migration and electromigration damage 78 1994
 
CORNING INCORPORATED (1)
5,770,473 Packaging of high power semiconductor lasers 33 1997
 
CREO IL, LTD. (1)
2002/0015,230 Controllable diffractive grating array with perpendicular diffraction 50 2001
 
CTS CORPORATION (1)
5,212,115 Method for microelectronic device packaging employing capacitively coupled connections 54 1991
 
DAIMLERCHRYSLER AG (1)
5,359,349 VDU workstation in a vehicle 100 1991
 
DIGITAL OPTICAL CORPORATION (1)
6,071,652 Fabricating optical elements using a photoresist formed from contact printing of a gray level mask 77 1998
 
DIMENSION TECHNOLOGIES, INC. (1)
4,829,365 Autostereoscopic display with illuminating lines, light valve and mask 120 1987
 
EMAGIN CORPORATION (1)
5,903,243 Compact, body-mountable field emission display device, and display panel having utility for use therewith 47 1997
 
EPOXY TECHNOLOGY, INC. (1)
5,074,947 Flip chip technology using electrically conductive polymers and dielectrics 212 1989
 
EXODUS INTERNATIONAL DISTRIBUTORS (1)
5,129,716 Stereoscopic video image display appliance wearable on head like spectacles 119 1990
 
FAIRCHILD SPACE AND DEFENSE CORPORATION (1)
5,491,612 Three-dimensional modular assembly of integrated circuits 143 1995
 
FELLOWS RESEARCH B.V., LLC (1)
6,254,792 Isotropic dry cleaning process for noble metal integrated circuit structures 54 1998
 
FORD MOTOR COMPANY (1)
4,765,865 Silicon etch rate enhancement 51 1987
 
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. (1)
5,296,891 Illumination device 461 1992
 
FSI INTERNATIONAL, INC. (1)
5,534,107 UV-enhanced dry stripping of silicon nitride films 80 1994
 
FUJI ELECTRIC CO., LTD. (1)
4,999,308 Method of making thin film solar cell array 51 1989
 
FUJI XEROX CO., LTD. (1)
5,457,567 Laser scanner having improved frequency characteristics 44 1992
 
FUJIFILM CORPORATION (1)
5,404,365 Polarized light coherent combining laser apparatus 42 1994
 
GENERAL SIGNAL CORPORATION (1)
5,068,205 Header mounted chemically sensitive ISFET and method of manufacture 59 1989
 
Goldstar Co., Ltd. (1)
4,978,202 Laser scanning system for displaying a three-dimensional color image 104 1989
 
GOOGLE INC. (1)
6,062,461 Process for bonding micromachined wafers using solder 107 1998
 
HAMAMATSU PHOTONICS K.K. (1)
5,361,131 Optical displacement measuring apparatus utilizing Fourier transform method 47 1992
 
Hercules Computer Technology (1)
4,924,413 Color conversion apparatus and method 74 1987
 
HITACHI SOFTWARE ENGINEERING CO., LTD. (1)
5,189,404 Display apparatus with rotatable display screen 123 1991
 
HITACHI TOHBU SEMICONDUCTOR, LTD. (1)
4,982,265 Semiconductor integrated circuit device and method of manufacturing the same 300 1988
 
HITACHI VLSI ENGINEERING CORP. (1)
5,188,280 Method of bonding metals, and method and apparatus for producing semiconductor integrated circuit device using said method of bonding metals 74 1991
 
HONEYWELL INTERNATIONAL INC. (1)
6,359,333 Wafer-pair having deposited layer sealed chambers 56 1998
 
HOYA CORPORATION (1)
6,091,521 Light collection from diffractive displays 40 1999
 
Hughes-Avicom International, Inc. (1)
5,467,106 Retractable face-up LCD monitor with off-monitor power supply and back-EMF braking 132 1994
 
I-O DISPLAY SYSTEMS LLC (1)
5,903,395 Personal visual display system 112 1995
 
IBM INFORMATION PRODUCTS CORPORATION, 55 RAILROAD AVENUE, GREENWICH, CT 06830 A CORP OF DE (1)
4,943,815 Laser printer with light-exposure prevention 53 1989
 
ILLINOIS TOOL WORKS INC. (1)
5,291,317 Holographic diffraction grating patterns and methods for creating the same 122 1990
 
INSTRUMENTARIUM CORP. (1)
6,124,145 Micromachined gas-filled chambers and method of microfabrication 47 1998
 
INTER SCIENCE, INC. (1)
6,421,179 Wavelength division multiplexing system and method using a reconfigurable diffraction grating 51 1999
 
INTERSIL CORPORATION (1)
5,915,168 Lid wafer bond packaging and micromachining 174 1998
 
IPG PHOTONICS CORPORATION (1)
5,262,000 Method for making micromechanical switch 116 1992
 
IXYS CH GMBH (1)
5,978,127 Light phase grating device 79 1997
 
JONES, ROBERT L., JR. (1)
4,462,046 Machine vision system utilizing programmable optical parallel processing 86 1982
 
LAM RESEARCH CORPORATION (1)
6,090,717 High density plasma etching of metallization layer using chlorine and nitrogen 55 1996
 
LANDIS & GYR IMMOBILIEN AG (1)
4,984,824 Document with an optical diffraction safety element 97 1989
 
LASERDYNAMICS, INC. (1)
4,897,708 Semiconductor wafer array 231 1986
 
LDT Gmb&H Co. Laser-Display-Technologie KG (1)
5,802,222 Color image generation systems and applications 103 1996
 
LGZ Landis & Gyr Zug AG (1)
4,556,378 Apparatus for embossing high resolution relief patterns 70 1984
 
LOCKHEED MARTIN CORPORATION (1)
4,982,184 Electrocrystallochromic display and element 361 1989
 
MacDonald, Dettwiler and Associates Ltd. (1)
4,456,338 Electronically tuneable light source 42 1982
 
Magma, Inc. (1)
5,696,560 Motion picture distribution system 58 1995
 
MCKESSON INFORMATION SOLUTIONS LLC (1)
4,814,759 Flat panel display monitor apparatus 156 1987
 
MEDIANA ELECTRONICS CO., LTD. (1)
5,801,074 Method of making an air tight cavity in an assembly package 67 1996
 
MEMS OPTICAL, INC. (1)
5,691,836 Optically addressed spatial light modulator and method 50 1995
 
Metals Production Research, Inc. (1)
4,487,677 Electrolytic recovery system for obtaining titanium metal from its ore 46 1983
 
MICRON TECHNOLOGY, INC. (1)
5,182,665 Diffractive light modulator 136 1990
 
Minnesota Mining and Manufacturing Company (1)
4,460,907 Electrographic imaging apparatus 48 1982
 
MITSUI CHEMICALS, INC. (1)
5,126,826 Light-emitting or receiving device and method for preparing the same 42 1990
 
MOTOROLA MOBILITY, INC. (1)
5,249,245 Optoelectroinc mount including flexible substrate and method for making same 127 1992
 
MVE, INC. (1)
5,904,737 Carbon dioxide dry cleaning system 108 1997
 
NATIONAL RESEARCH COUNCIL OF CANADA (1)
4,707,064 Optical mixing/demixing device 79 1986
 
NEW ENERGY AND INDUSTRIAL TECHNOLOGY DEVELOPMENT ORGANIZATION (1)
5,191,405 Three-dimensional stacked LSI 158 1989
 
New York Institute of Technology (1)
4,641,193 Video display apparatus and method 58 1984
 
NEWPORT CORPORATION (1)
5,319,668 Tuning system for external cavity diode laser 156 1992
 
NIKON CORPORATION (1)
5,517,357 Anti-vibration optical device 40 1994
 
North American Philips Corporation (1)
5,420,655 Color projection system employing reflective display devices and prism illuminators 84 1992
 
Northrop Corporation (1)
5,170,283 Silicon spatial light modulator 166 1991
 
NORTHROP GRUMMAN CORPORATION (1)
5,844,711 Tunable spatial light modulator 68 1997
 
NORTHROP GRUMMAN SYSTEMS CORPORATION (1)
6,418,152 Multi-amplifier, high power mode locked laser 48 2000
 
NORTHWESTERN UNIVERSITY (1)
6,261,494 Method of forming plastically deformable microstructures 56 1998
 
Nutech Optical Systems, Inc. (1)
6,497,490 Laser beam attenuator and method of attenuating a laser beam 49 1999
 
PANASONIC LIQUID CRYSTAL DISPLAY CO., LTD. (1)
5,640,216 Liquid crystal display device having video signal driving circuit mounted on one side and housing 157 1995
 
PDACO LTD. (1)
5,151,724 Dynamic holographic display with cantilever 61 1991
 
PHOTOTERA TECHNOLOGIES, INC., A SUBSIDIARY OF SCHWARTZ ELECTRO-OPTICS, INC. (1)
6,154,259 Multi-beam laser scanning display system with speckle elimination 117 1997
 
POLYCHROMIX, INC. (1)
5,757,536 Electrically-programmable diffraction grating 153 1995
 
RAF Electronics Corp. (1)
5,022,750 Active matrix reflective projection system 94 1989
 
RCA Corporation (1)
4,408,884 Optical measurements of fine line parameters in integrated circuit processes 136 1981
 
RCA LICENSING CORPORATION, TWO INDEPENDENCE WAY, PRINCETON, NJ 08540, A CORP. OF DE (1)
4,467,342 Multi-chip imager 78 1982
 
REFLECTION TECHNOLOGY A CORP. OF MASSACHUSETTS (1)
5,334,991 Dual image head-mounted display 131 1992
 
RENESAS ELECTRONICS CORPORATION (1)
5,219,794 Semiconductor integrated circuit device and method of fabricating same 102 1992
 
RICOH COMPANY, LTD. (1)
5,606,181 Edge emitting type light emitting diode array heads 96 1995
 
ROBERT BOSCH GMBH (1)
5,151,763 Acceleration and vibration sensor and method of making the same 127 1990
 
ROCHESTER INSTITUTE OF TECHNOLOGY (1)
5,357,803 Micromachined microaccelerometer for measuring acceleration along three axes 51 1992
 
ROHM CO., LTD. (1)
5,075,940 Process for producing solid electrolytic capacitors 51 1991
 
SANDISK IL LTD. (1)
5,404,485 Flash file system 511 1993
 
SANYO ELECTRIC CO., LTD. (1)
4,721,629 Method of manufacturing photovoltaic device 47 1985
 
SCHOOLMAN SCIENTIFIC CORPORATION (1)
5,281,957 Portable computer and head mounted display 229 1991
 
SDL, INC. (1)
4,763,975 Optical system with bright light output 103 1987
 
Sega Enterprises, Ltd. (1)
5,712,649 Head-mounted image display 90 1996
 
SELEX ES LTD (1)
5,942,791 Micromachined devices having microbridge structure 42 1997
 
SGS-Thomson Microelectronics S.A. (1)
5,041,395 Method of encapsulating an integrated circuit using a punched metal grid attached to a perforated dielectric strip 102 1990
 
SONY ELECTRONICS INC. (1)
6,565,222 High performance, low cost mirror for a rear projection television 34 2000
 
STANLEY ELECTRIC CO., LTD. (1)
5,179,367 Suspended display apparatus 65 1990
 
STRYKER CORPORATION (1)
5,926,318 Biocular viewing system with intermediate image planes for an electronic display device 77 1998
 
SUN MICROSYSTEMS, INC. (1)
5,544,306 Flexible dram access in a frame buffer memory and system 133 1994
 
SUNPOWER CORPORATION (1)
5,164,019 Monolithic series-connected solar cells having improved cell isolation and method of making same 92 1991
 
SURFACE TECHNOLOGY SYSTEMS LIMITED (1)
5,330,301 Loading mechanisms 61 1992
 
TECHNIC, INC. (1)
5,003,300 Head mounted display for miniature video display system 270 1988
 
TECHNOLOGY HOLDING COMPANY II (1)
5,149,405 Four-axis ECM machine and method of operation 44 1991
 
TEKTRONIX, INC. (1)
4,719,507 Stereoscopic imaging system with passive viewing apparatus 151 1985
 
TERADATA US, INC. (1)
5,454,160 Apparatus and method for stacking integrated circuit devices 131 1993
 
TESSERA TECHNOLOGIES HUNGARY KFT. (1)
5,455,455 Methods for producing packaged integrated circuit devices and packaged integrated circuit devices produced thereby 114 1993
 
TEXAS INSTRUMENTS DEUTSCHLAND GMBH (1)
5,491,715 Automatic antenna tuning method and circuit 235 1993
 
TEXAS INSTRUMENTS HOLLAND B.V. (1)
5,453,747 Transponder systems for automatic identification purposes 152 1994
 
TEXTRON IPMP L.P. (1)
4,311,999 Vibratory scan optical display 63 1980
 
The Boeing Company (1)
6,342,960 Wavelength division multiplex transmitter 49 1998
 
THE REGENTS OF THE UNIVERSITY OF MICHIGAN (1)
4,945,773 Force transducer etched from silicon 49 1989
 
THOMSON LICENSING (1)
5,315,418 Two path liquid crystal light valve color display with light coupling lens array disposed along the red-green light path 152 1992
 
Thomson-CSF (1)
5,663,817 Projector of narrow field moving images 50 1994
 
TOYOTA JIDOSHA KABUSHIKI KAISHA (1)
6,241,143 Producing method of a film-type transmission line and method of connecting to an existing line 42 1999
 
Tropper Technologies, Inc. (1)
5,892,505 Image viewing apparatus and method 46 1997
 
UNITED CALIFORNIA BANK (FORMERLY KNOWN AS SNAWA BANK CALIFORNIA) (1)
5,886,675 Autostereoscopic display system with fan-out multiplexer 78 1995
 
UNITED MICROELECTRONICS CORP. (1)
5,481,133 Three-dimensional multichip package 271 1994
 
UNIVERSITY OF SOUTHERN CALIFORNIA (1)
5,339,177 Incoherent/coherent source array for multiplexed holographic recording and readout 50 1992
 
VACUMET CORPORATION (1)
5,155,604 Coated paper sheet embossed with a diffraction or holographic pattern 112 1990
 
VICTOR COMPANY OF JAPAN, LTD. (1)
4,836,649 Optical layout for a three light valve full-color projector employing a dual relay lens system and a single projection lens 94 1985
 
Virtual Research Systems (1)
5,321,416 Head-mounted visual display apparatus 125 1992
 
VISION NEWCO, INC. (1)
5,539,422 Head mounted display system 129 1993
 
ZOZO MANAGEMENT, LLC (1)
5,523,920 Printed circuit board comprising elevated bond pads 81 1994
 
ZYGO CORPORATION (1)
5,862,164 Apparatus to transform with high efficiency a single frequency, linearly polarized laser beam into beams with two orthogonally polarized frequency components orthogonally polarized 57 1996
 
Other [Check patent profile for assignment information] (16)
4,571,041 Three dimensional projection arrangement 56 1984
4,661,828 Optical imaging head 46 1985
4,744,633 Stereoscopic viewing system and glasses 62 1986
4,807,965 Apparatus for three-dimensional viewing 67 1987
4,940,309 Tessellator 44 1989
5,354,416 Dry etching method 54 1990
5,347,433 Collimated beam of light and systems and methods for implementation thereof 68 1992
5,281,887 Two independent spatial variable degree of freedom wavefront modulator 47 1992
5,493,439 Enhanced surface deformation light modulator 111 1992
5,357,369 Wide-field three-dimensional viewing system 90 1992
5,408,123 Functional chip to be used while stacked on another chip and stack structure formed by the same 56 1994
5,623,361 Enhanced wavefront phase modulator device 47 1995
5,661,593 Linear electrostatic modulator 55 1995
5,707,160 Infrared based computer input devices including keyboards and touch pads 70 1996
6,177,980 High-throughput, maskless lithography system 287 1999
6,188,519 Bigrating light valve 61 2000
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (3)
* 7,310,179 Method and device for selective adjustment of hysteresis window 8 2005
7,576,901 Method and device for selective adjustment of hysteresis window 3 2007
7,952,788 Method and device for selective adjustment of hysteresis window 0 2009
 
AXSUN TECHNOLOGIES, INC. (1)
8,660,164 Method and system for avoiding package induced failure in swept semiconductor source 0 2012
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
* 7,417,315 Negative thermal expansion system (NTEs) device for TCE compensation in elastomer composites and conductive elastomer interconnects in microelectronic packaging 2 2002
 
Katholieke Universiteit (1)
* 8,383,441 Method for manufacturing a micromachined device and the micromachined device made thereof 0 2011
 
RAYTHEON COMPANY (1)
* 8,537,552 Heat sink interface having three-dimensional tolerance compensation 0 2009
* Cited By Examiner

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