Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6922272
SERIAL NO

10367440

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A MEMS device such as a grating light valve™ light modulator is athermalized such that the force required to deflect the movable portion of the MEMS device remains constant over a range of temperatures. In MEMS embodiments directed to a grating light valve™ light modulator, a ribbon is suspended over a substrate, and the ribbon tension is kept constant over a temperature range by adjusting the aggregate thermal coefficient of expansion of the ribbon to match the aggregate thermal coefficient of expansion of the substrate. Various opposition materials have an opposite thermal coefficient of expansion as the aluminum layer of a grating light valve™ light modulator ribbon, using the thermal coefficient of expansion of the substrate as a zero coefficient reference. The adjustment of the thermal coefficient of expansion of the ribbon can be performed variously by thickening existing layers of opposition material or adding additional layers of new opposition material to the ribbon, or reducing the aluminum in aluminum layer. The aluminum layer may be reduced variously by reducing the thickness of the aluminum layer, or reducing the surface area that the aluminum covers, or reducing both the surface area and the thickness. Embodiments may combine the reduction of aluminum with the use of opposition materials.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
SILICON LIGHT MACHINES CORPORATIONSUNNYVALE, CA142

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
de, Groot Wilhelmus Palo Alto, CA 3 11
Maheshwari, Dinesh Fremont, CA 60 434

Cited Art Landscape

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6356689 Article comprising an optical cavity 73 2000
 
ALPS ELECTRIC CO., LTD. (1)
5847859 Optical reading device 61 1996
 
CORNELL RESEARCH FOUNDATION, INC. (1)
5439731 Interconnect structures containing blocked segments to minimize stress migration and electromigration damage 94 1994
 
AURA SYSTEMS, INC. (5)
5150205 Actuated mirror optical intensity modulation 57 1989
5126836 Actuated mirror optical intensity modulation 90 1989
5185660 Actuated mirror optical intensity modulation 79 1990
5085497 Method for fabricating mirror array for optical projection system 79 1990
5260798 Pixel intensity modulator 53 1992
 
FUJI ELECTRIC CO., LTD. (1)
4999308 Method of making thin film solar cell array 53 1989
 
MOTOROLA, INC. (4)
4700276 Ultra high density pad array chip carrier 87 1986
5115344 Tunable diffraction grating 66 1990
5157304 Field emission device display with vacuum seal 70 1990
5486946 Integrated electro-optic package for reflective spatial light modulators 87 1994
 
NEW ENERGY AND INDUSTRIAL TECHNOLOGY DEVELOPMENT ORGANIZATION (1)
5191405 Three-dimensional stacked LSI 181 1989
 
ZYGO CORPORATION (1)
5862164 Apparatus to transform with high efficiency a single frequency, linearly polarized laser beam into beams with two orthogonally polarized frequency components orthogonally polarized 57 1996
 
DENSO CORPORATION (2)
5554304 Process for producing a micromotion mechanical structure 63 1995
5825443 Color liquid crystal display with three dichroic mirrors reflecting in different directions to three pixels which reflect to common optics 45 1997
 
INTEL CORPORATION (5)
5768009 Light valve target comprising electrostatically-repelled micro-mirrors 96 1997
6163026 Chemically stabilized light selective element for imaging applications 42 1998
5926309 Light valve target comprising electrostatically-repelled micro-mirrors 94 1998
6123985 Method of fabricating a membrane-actuated charge controlled mirror (CCM) 95 1998
6346430 Packaged integrated processor and spatial light modulator 44 2000
 
AK Technology, Inc. (1)
5239806 Thermoplastic semiconductor package and method of producing it 53 1992
 
MITSUBISHI DENKI KABUSHIKI KAISHA (2)
* 4561011 Dimensionally stable semiconductor device 91 1983
5093281 method for manufacturing semiconductor devices 49 1989
 
UNITED TECHNOLOGIES CORPORATION (2)
4426768 Ultra-thin microelectronic pressure sensors 64 1981
4440839 Method of forming laser diffraction grating for beam sampling device 70 1983
 
FAIRCHILD SPACE AND DEFENSE CORPORATION (1)
5491612 Three-dimensional modular assembly of integrated circuits 144 1995
 
JONES, ROBERT L., JR. (1)
4462046 Machine vision system utilizing programmable optical parallel processing 86 1982
 
RESEARCH TRIANGLE INSTITUTE (1)
6229683 High voltage micromachined electrostatic switch 107 1999
 
SELEX ES LTD (1)
5942791 Micromachined devices having microbridge structure 42 1997
 
THOMSON-CSF (1)
5663817 Projector of narrow field moving images 50 1994
 
ROCHESTER INSTITUTE OF TECHNOLOGY (1)
5357803 Micromachined microaccelerometer for measuring acceleration along three axes 52 1992
 
GENERAL SIGNAL CORPORATION (1)
5068205 Header mounted chemically sensitive ISFET and method of manufacture 60 1989
 
MEDIANA ELECTRONICS CO., LTD (1)
5801074 Method of making an air tight cavity in an assembly package 67 1996
 
TEXTRON IPMP L.P. (1)
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MASSACHUSETTS INSTITUTE OF TECHNOLOGY (2)
5310624 Integrated circuit micro-fabrication using dry lithographic processes 59 1992
5742373 Color microdisplays and methods of manufacturing same 57 1995
 
LASERDYNAMICS, INC. (1)
4897708 Semiconductor wafer array 256 1986
 
NEC CORPORATION (4)
4751509 Light valve for use in a color display unit with a diffraction grating assembly included in the valve 85 1986
5534883 Video signal interface 155 1993
5508561 Apparatus for forming a double-bump structure used for flip-chip mounting 191 1994
5841929 Light wavelength filtering circuit and manufacturing method thereof 43 1996
 
The Charles Stark Draper Laboratory, Inc. (2)
5126812 Monolithic micromechanical accelerometer 104 1990
5837562 Process for bonding a shell to a substrate for packaging a semiconductor 120 1995
 
KULITE SEMICONDUCTOR PRODUCTS, INC. (2)
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5955771 Sensors for use in high vibrational applications and methods for fabricating same 114 1997
 
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6396789 Data storage system and methods using diffractive near-field optics 47 1998
 
CITIZEN WATCH CO., LTD. (4)
4561044 Lighting device for a display panel of an electronic device 71 1984
4663670 Television receiver having a liquid crystal display device 59 1984
4652932 Liquid crystal display television receiver 78 1985
4646158 Liquid crystal television receiver 87 1985
 
SNAPTRACK, INC. (3)
5835255 Visible spectrum modulator arrays 604 1994
5986796 Visible spectrum modulator arrays 584 1996
6055090 Interferometric modulation 495 1999
 
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4930043 Closed-loop capacitive accelerometer with spring constraint 66 1989
 
THOMSON LICENSING (1)
5315418 Two path liquid crystal light valve color display with light coupling lens array disposed along the red-green light path 153 1992
 
HONEYWELL INTERNATIONAL INC. (1)
6359333 Wafer-pair having deposited layer sealed chambers 59 1998
 
Honeywell Inc. (3)
5113285 Full color three-dimensional flat panel display 150 1990
5418584 Retroreflective array virtual image projection screen 138 1992
5895233 Integrated silicon vacuum micropackage for infrared devices 142 1997
 
SANYO ELECTRIC CO., LTD. (1)
4721629 Method of manufacturing photovoltaic device 48 1985
 
Goldstar Co., Ltd. (1)
4978202 Laser scanning system for displaying a three-dimensional color image 105 1989
 
KOPIN CORPORATION (4)
5258325 Method for manufacturing a semiconductor device using a circuit transfer film 225 1992
5713652 Slide projector mountable light valve display 65 1994
5815126 Monocular portable communication and display system 219 1996
6097352 Color sequential display panels 198 1997
 
SNAP-TITE TECHNOLOGIES, INC. (2)
5377705 Precision cleaning system 134 1993
5526834 Apparatus for supercritical cleaning 79 1994
 
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5371618 Color liquid crystal display employing dual cells driven with an EXCLUSIVE OR relationship 198 1993
 
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MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (5)
4389096 Image display apparatus of liquid crystal valve projection type 294 1981
5299289 Polymer dispersed liquid crystal panel with diffraction grating 134 1992
5510758 Multilayer microstrip wiring board with a semiconductor device mounted thereon via bumps 168 1994
5920418 Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator 132 1995
5949570 Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator 70 1997
 
ATMEL CORPORATION (1)
5137836 Method of manufacturing a repairable multi-chip module 118 1991
 
UNIVERSITY OF SOUTHERN CALIFORNIA (1)
5339177 Incoherent/coherent source array for multiplexed holographic recording and readout 50 1992
 
ROYAL BANK CAPITAL PARTNERS (2)
5673139 Microelectromechanical television scanning device and method for making the same 329 1993
5914801 Microelectromechanical devices including rotating plates and related methods 197 1996
 
SONY CORPORATION (7)
4649432 Video display system 98 1985
5486841 Glasses type display apparatus 117 1993
5451103 Projector system 52 1994
5485172 Automatic image regulating arrangement for head-mounted image display apparatus 87 1994
5757354 Portable data communication apparatus with rotatable display images for accomodating a wireless remote keyboard 204 1995
6392309 Semiconductor device including solid state imaging device 46 1996
6249381 Illuminating method and illuminating device 154 1999
 
Raychem Corporation (2)
5113272 Three dimensional semiconductor display using liquid crystal 141 1990
5307185 Liquid crystal projection display with complementary color dye added to longest wavelength imaging element 58 1992
 
SAMSUNG ELECTRONICS CO., LTD. (2)
5066614 Method of manufacturing a leadframe having conductive elements preformed with solder bumps 90 1990
* 5552635 High thermal emissive semiconductor device package 162 1995
 
RAF Electronics Corp. (1)
5022750 Active matrix reflective projection system 94 1989
 
SONY ELECTRONICS INC. (1)
6565222 High performance, low cost mirror for a rear projection television 34 2000
 
LANDIS & GYR IMMOBILIEN AG (1)
4984824 Document with an optical diffraction safety element 99 1989
 
EPOXY TECHNOLOGY, INC. (1)
5074947 Flip chip technology using electrically conductive polymers and dielectrics 216 1989
 
PHOTOTERA TECHNOLOGIES, INC., A SUBSIDIARY OF SCHWARTZ ELECTRO-OPTICS, INC. (1)
6154259 Multi-beam laser scanning display system with speckle elimination 126 1997
 
LGZ Landis & Gyr Zug AG (1)
4556378 Apparatus for embossing high resolution relief patterns 70 1984
 
RENESAS ELECTRONICS CORPORATION (1)
5219794 Semiconductor integrated circuit device and method of fabricating same 102 1992
 
Ascom Tech Ltd. (1)
5508840 Light modulator 52 1993
 
TOYOTA JIDOSHA KABUSHIKI KAISHA (1)
6241143 Producing method of a film-type transmission line and method of connecting to an existing line 42 1999
 
VICTOR COMPANY OF JAPAN, LTD. (1)
4836649 Optical layout for a three light valve full-color projector employing a dual relay lens system and a single projection lens 95 1985
 
New York Institute of Technology (1)
4641193 Video display apparatus and method 58 1984
 
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA (5)
4896325 Multi-section tunable laser with differing multi-element mirrors 157 1988
5233460 Method and means for reducing speckle in coherent laser pulses 99 1992
5493177 Sealed micromachined vacuum and gas filled devices 151 1993
5726480 Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same 279 1995
6210988 Polycrystalline silicon germanium films for forming micro-electromechanical systems 219 2000
 
SURFACE TECHNOLOGY SYSTEMS LIMITED (1)
5330301 Loading mechanisms 61 1992
 
GLOBALFOUNDRIES INC. (2)
5300813 Refractory metal capped low resistivity metal conductor lines and vias 122 1992
5517340 High performance projection display with two light valves 96 1995
 
SUMITOMO ELECTRIC INDUSTRIES, LTD. (2)
5214308 Substrate for packaging a semiconductor device 288 1991
5298460 Substrate for packaging a semiconductor device 43 1992
 
TERADATA US, INC. (1)
5454160 Apparatus and method for stacking integrated circuit devices 135 1993
 
RICOH COMPANY, LTD. (1)
5606181 Edge emitting type light emitting diode array heads 109 1995
 
NATIONAL SEMICONDUCTOR CORPORATION (3)
4355463 Process for hermetically encapsulating semiconductor devices 118 1980
4882683 Cellular addressing permutation bit map raster graphics architecture 89 1987
6313901 Liquid crystal display fabrication process using a final rapid thermal anneal 31 1999
 
L-3 COMMUNICATIONS CORPORATION (2)
5486698 Thermal imaging system with integrated thermal chopper 88 1994
5512748 Thermal imaging system with a monolithic focal plane array and method 93 1994
 
DELPHI TECHNOLOGIES, INC. (3)
5221400 Method of making a microaccelerometer having low stress bonds and means for preventing excessive z-axis deflection 47 1990
5220200 Provision of substrate pillars to maintain chip standoff 96 1991
5427975 Method of micromachining an integrated sensor on the surface of a silicon wafer 118 1993
 
NEOPHOTONICS CORPORATION (2)
6268952 Micromechanical light steering optical switch 91 1999
6169624 Achromatic optical modulators 58 1999
 
MICROVISION, INC. (3)
4934773 Miniature video display system 319 1987
5023905 Pocket data receiver with full page visual display 96 1988
5048077 Telephone handset with full-page visual display 151 1988
 
MEMS OPTICAL, INC. (1)
5691836 Optically addressed spatial light modulator and method 53 1995
 
DAEWOO ELECTRONICS CO., LTD. (2)
5469302 Electrostrictive mirror actuator for use in optical projection system 89 1994
5506720 Method for manufacturing an electrodisplacive actuated mirror array 64 1994
 
Optron Systems, Inc. (2)
5287215 Membrane light modulation systems 184 1991
5471341 Membrane light modulating systems 183 1993
 
STRYKER CORPORATION (1)
5926318 Biocular viewing system with intermediate image planes for an electronic display device 82 1998
 
COHERENT, INC. (1)
4711526 Attenuating beam splitter 47 1986
 
Bright & Morning Star, CA. (1)
4772094 Optical stereoscopic system and prism window 158 1985
 
COMSAT CORPORATION (1)
4797918 Subscription control for television programming 60 1987
 
FLORIDA ATLANTIC UNIVERSITY (2)
5231432 Projector utilizing liquid crystal light-valve and color selection by diffraction 86 1991
5303043 Projection television display utilizing Bragg diffraction cell for producing horizontal scan 46 1992
 
OL SECURITY LIMITED LIABILITY COMPANY (2)
6222954 Fault-tolerant fiber-optical beam control modules 108 1999
6563974 High resolution fault-tolerant fiber-optical beam control modules 44 2001
 
SDL, INC. (1)
4763975 Optical system with bright light output 108 1987
 
PDACO LTD. (1)
5151724 Dynamic holographic display with cantilever 61 1991
 
ROCKWELL INTERNATIONAL CORPORATION (2)
5198895 Holographic head-up display 51 1991
5315423 Wavelength multiplexed two dimensional image transmission through single mode optical fiber 74 1992
 
The United States of America as represented by the Secretary of the Army (2)
4361384 High luminance miniature display 124 1980
5319214 Infrared image projector utilizing a deformable mirror device spatial light modulator 76 1992
 
The United States of America as represented by the Secretary of the Air Force (3)
4511220 Laser target speckle eliminator 103 1982
4649085 Cryogenic glass-to-metal seal 55 1984
4698602 Micromirror spatial light modulator 92 1985
 
CTS CORPORATION (1)
5212115 Method for microelectronic device packaging employing capacitively coupled connections 56 1991
 
MOTOROLA MOBILITY, INC. (1)
5249245 Optoelectroinc mount including flexible substrate and method for making same 127 1992
 
LUMENTUM OPERATIONS LLC (2)
5920411 Optical multiplexing/demultiplexing device 67 1997
6122299 Angled distributed reflector optical device with enhanced light confinement 61 1997
 
MIYAKAWA CORPORATION (2)
5461547 Flat panel display lighting system 132 1993
5485354 Flat panel display lighting system 142 1993
 
ANALOG DEVICES, INC. (1)
5694740 Micromachined device packaged to reduce stiction 86 1996
 
SGS-Thomson Microelectronics S.A. (1)
5041395 Method of encapsulating an integrated circuit using a punched metal grid attached to a perforated dielectric strip 103 1990
 
Hercules Computer Technology (1)
4924413 Color conversion apparatus and method 76 1987
 
MICROSS ADVANCED INTERCONNECT TECHNOLOGY LLC (1)
6057520 Arc resistant high voltage micromachined electrostatic switch 122 1999
 
STANLEY ELECTRIC CO., LTD. (1)
5179367 Suspended display apparatus 67 1990
 
APPLIED MATERIALS, INC. (1)
6286231 Method and apparatus for high-pressure wafer processing and drying 101 2000
 
Dimension Technologies, Inc. (1)
4829365 Autostereoscopic display with illuminating lines, light valve and mask 136 1987
 
CHEETAH OMNI, LLC (1)
6445502 Variable blazed grating 62 2001
 
PANASONIC LIQUID CRYSTAL DISPLAY CO., LTD. (1)
5640216 Liquid crystal display device having video signal driving circuit mounted on one side and housing 176 1995
 
HITACHI, LTD. (4)
* 4556899 Insulated type semiconductor devices 22 1982
5119204 Liquid crystal television set having driving circuit on peripheral portion and method of fabrication of image display section 96 1989
4970575 Semiconductor device 81 1990
5868854 Method and apparatus for processing samples 52 1992
 
HOYA CORPORATION (1)
6091521 Light collection from diffractive displays 40 1999
 
APPLE INC. (1)
5523920 Printed circuit board comprising elevated bond pads 82 1994
 
The United States of America as represented by the United States Department of Energy (2)
4915463 Multilayer diffraction grating 107 1988
4963012 Passivation coating for flexible substrate mirrors 99 1988
 
KABUSHIKI KAISHA TOSHIBA (7)
4807021 Semiconductor device having stacking structure 314 1987
5229597 Image pickup device suitable for dimensional measurement image pickup equipment including a vernier pixel array 40 1991
5394303 Semiconductor device 260 1993
5480839 Semiconductor device manufacturing method 79 1994
5461197 Electronic device having a chip with an external bump terminal equal or smaller than a via hole on a board 64 1994
5629566 Flip-chip semiconductor devices having two encapsulants 119 1995
5995303 Optical element and optical device 53 1995
 
BELL TELEPHONE LABORATORIES, INCORPORATED (3)
4327966 Variable attenuator for laser radiation 58 1980
4327411 High capacity elastic store having continuously variable delay 58 1980
4717066 Method of bonding conductors to semiconductor devices 129 1986
 
Advanced Optical Technologies, Inc. (1)
6115168 Integrated optical retroreflecting modulator 45 1998
 
DIGITAL OPTICAL CORPORATION (1)
6071652 Fabricating optical elements using a photoresist formed from contact printing of a gray level mask 77 1998
 
RAYTHEON COMPANY (3)
5024494 Focussed light source pointer for three dimensional display 71 1990
5450219 Raster following telecentric illumination scanning system for enhancing light throughout in light valve projection systems 63 1993
5668611 Full color sequential image projection system incorporating pulse rate modulated illumination 118 1995
 
TECHNIC, INC. (1)
5003300 Head mounted display for miniature video display system 308 1988
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (11)
4414583 Scanned light beam imaging method and apparatus 55 1981
4422099 Optical communication on variable power beam 49 1982
4588957 Optical pulse compression apparatus and method 61 1982
4545610 Method for forming elongated solder connections between a semiconductor device and a supporting substrate 296 1983
4811082 High performance integrated circuit packaging structure 437 1986
4896948 Simplified double-cavity tunable optical filter using voltage-dependent refractive index 51 1989
5239448 Formulation of multichip modules 238 1991
5210637 High speed light modulation 48 1991
5296408 Fabrication method for vacuum microelectronic devices 44 1992
5523619 High density memory structure 133 1993
5744752 Hermetic thin film metallized sealband for SCM and MCM-D modules 62 1995
 
ADVANCED MICRO DEVICES, INC. (2)
6300148 Semiconductor structure with a backside protective layer and backside probes and a method for constructing the structure 43 1998
6274469 Process using a plug as a mask for a gate 41 2000
 
AT&T IPM CORP. (1)
5473512 Electronic device package having electronic device boonded, at a localized region thereof, to circuit board 118 1994
 
LSI LOGIC CORPORATION (3)
5340772 Method of increasing the layout efficiency of dies on a wafer and increasing the ratio of I/O area to active area per die 57 1992
5399898 Multi-chip semiconductor arrangements using flip chip dies 409 1992
5438477 Die-attach technique for flip-chip style mounting of semiconductor dies 159 1993
 
SIEMENS AKTIENGESELLSCHAFT (3)
4417386 Method for mounting a semiconductor device in a housing 45 1980
4804641 Method for limiting chippage when sawing a semiconductor wafer 63 1986
5808323 Microoptical device with mirrors 71 1996
 
Virtual Research Systems (1)
5321416 Head-mounted visual display apparatus 130 1992
 
FUJITSU LIMITED (2)
4824200 Optical branching filter 76 1987
5475236 Semiconductor chip for mounting on a semiconductor package substrate by a flip-clip process 148 1995
 
I-O DISPLAY SYSTEMS LLC (1)
5903395 Personal visual display system 138 1995
 
OVD KINEGRAM AG (2)
4761253 Method and apparatus for producing a relief pattern with a microscopic structure, in particular having an optical diffraction effect 80 1987
5101184 Diffraction element and optical machine-reading device 112 1989
 
InterScience, Inc. (2)
5999319 Reconfigurable compound diffraction grating 87 1998
6282213 Tunable diode laser with fast digital line selection 75 1998
 
ILLINOIS TOOL WORKS INC. (1)
5291317 Holographic diffraction grating patterns and methods for creating the same 125 1990
 
AGFA-GEVAERT N.V. (1)
5453778 Method and apparatus for spatial modulation in the cross-process direction 78 1993
 
MacDonald, Dettwiler and Associates Ltd. (1)
4456338 Electronically tuneable light source 42 1982
 
AGFA CORPORATION (1)
6229650 Optical imaging head having a multiple writing bean source 60 1999
 
ROBERT BOSCH GMBH (1)
5151763 Acceleration and vibration sensor and method of making the same 146 1990
 
VENTURE LENDING & LEASING IV, INC. (4)
5835256 Reflective spatial light modulator with encapsulated micro-mechanical elements 381 1996
6046840 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 371 1998
6290864 Fluoride gas etching of silicon with improved selectivity 81 1999
6172797 Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements 206 1999
 
BAE SYSTEMS ELECTRONICS LIMITED (1)
5192864 Two dimensional display produced by one dimensional scanned emitters 48 1991
 
MVE, INC. (1)
5904737 Carbon dioxide dry cleaning system 109 1997
 
CASIO COMPUTER CO., LTD. (3)
4809078 Liquid crystal television receiver 87 1984
4722593 Liquid-crystal projector with light beam reduction lens array for improved brightness of image outer portions 99 1986
4803560 Liquid-crystal television receiver with cassette tape recorder 61 1987
 
MCKESSON INFORMATION SOLUTIONS LLC (1)
4814759 Flat panel display monitor apparatus 167 1987
 
UNITED CALIFORNIA BANK (FORMERLY KNOWN AS SNAWA BANK CALIFORNIA) (1)
5886675 Autostereoscopic display system with fan-out multiplexer 81 1995
 
Nutech Optical Systems, Inc. (1)
6497490 Laser beam attenuator and method of attenuating a laser beam 49 1999
 
INSTRUMENTARIUM CORP. (1)
6124145 Micromachined gas-filled chambers and method of microfabrication 48 1998
 
LAM RESEARCH CORPORATION (1)
6090717 High density plasma etching of metallization layer using chlorine and nitrogen 55 1996
 
KODAK GRAPHIC COMMUNICATIONS CANADA COMPANY (7)
4743091 Two dimensional laser diode array 116 1986
5049901 Light modulator using large area light sources 121 1990
5132723 Method and apparatus for exposure control in light valves 92 1991
5359451 High efficiency acousto-optic modulator 46 1993
5420722 Self-registering microlens for laser diodes 55 1993
5517359 Apparatus for imaging light from a laser diode onto a multi-channel linear light valve 124 1995
5699740 Method of loading metal printing plates on a vacuum drum 51 1996
 
LDT Gmb&H Co. Laser-Display-Technologie KG (1)
5802222 Color image generation systems and applications 111 1996
 
FREESCALE SEMICONDUCTOR, INC. (5)
5147815 Method for fabricating a multichip semiconductor device having two interdigitated leadframes 162 1991
5323051 Semiconductor wafer level package 147 1991
5313835 Integrated monolithic gyroscopes/accelerometers with logic circuits 150 1991
* 5216278 Semiconductor device having a pad array carrier package 594 1992
5352926 Flip chip package and method of making 149 1993
 
CALIFORNIA INSTITUTE OF TECHNOLOGY (3)
5206829 Thin film ferroelectric electro-optic memory 35 1990
5832148 Electrically controlled wavelength multiplexing waveguide filter 74 1996
6069392 Microbellows actuator 88 1998
 
FELLOWS RESEARCH B.V., LLC (1)
6254792 Isotropic dry cleaning process for noble metal integrated circuit structures 56 1998
 
STOVOKOR TECHNOLOGY LLC (2)
4926241 Flip substrate for chip mount 147 1988
5039628 Flip substrate for chip mount 79 1990
 
VACUMET CORPORATION (1)
5155604 Coated paper sheet embossed with a diffraction or holographic pattern 120 1990
 
RCA Licensing Corporation (1)
4467342 Multi-chip imager 82 1982
 
POLYCHROMIX, INC. (1)
5757536 Electrically-programmable diffraction grating 160 1995
 
RCA Corporation (1)
4408884 Optical measurements of fine line parameters in integrated circuit processes 142 1981
 
FUJITSU SEMICONDUCTOR LIMITED (2)
5519251 Semiconductor device and method of producing the same 99 1993
5508565 Semiconductor device having a plurality of chips having identical circuit arrangement sealed in package 125 1994
 
Magma, Inc. (1)
5696560 Motion picture distribution system 59 1995
 
TESSERA TECHNOLOGIES HUNGARY KFT. (1)
5455455 Methods for producing packaged integrated circuit devices and packaged integrated circuit devices produced thereby 124 1993
 
HITACHI SOFTWARE ENGINEERING CO., LTD. (1)
5189404 Display apparatus with rotatable display screen 129 1991
 
ASAHI GLASS COMPANY, LIMITED (1)
5798805 Projection type display apparatus 69 1995
 
TECHNOLOGY HOLDING COMPANY II (1)
5149405 Four-axis ECM machine and method of operation 46 1991
 
GENERAL ELECTRIC COMPANY (3)
4558171 Hermetic enclosure for electronic components with an optionally transparent cover and a method of making the same 65 1984
4687326 Integrated range and luminance camera 107 1985
5367585 Integrated microelectromechanical polymeric photonic switch 84 1993
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (5)
5311360 Method and apparatus for modulating a light beam 598 1992
5459610 Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 322 1993
5677783 Method of making a deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 109 1995
6219015 Method and apparatus for using an array of grating light valves to produce multicolor optical images 92 1996
6154305 Miniature scanning confocal microscope 66 1999
 
HITACHI TOHBU SEMICONDUCTOR, LTD. (1)
4982265 Semiconductor integrated circuit device and method of manufacturing the same 360 1988
 
FSI INTERNATIONAL, INC. (1)
5534107 UV-enhanced dry stripping of silicon nitride films 80 1994
 
Hitachi VLSI Engineering Corp. (1)
5188280 Method of bonding metals, and method and apparatus for producing semiconductor integrated circuit device using said method of bonding metals 77 1991
 
North American Philips Corporation (1)
5420655 Color projection system employing reflective display devices and prism illuminators 84 1992
 
EASTMAN KODAK COMPANY (17)
4374397 Light valve devices and electronic imaging/scan apparatus with locationally-interlaced optical addressing 84 1981
4797694 Scan-multiplexed light valve printer with band-reducing construction 51 1987
4801194 Multiplexed array exposing system having equi-angular scan exposure regions 74 1987
5521748 Light modulator with a laser or laser array for exposing image data 146 1994
5793519 Micromolded integrated ceramic light reflector 69 1996
5898515 Light reflecting micromachined cantilever 66 1996
5923475 Laser printer using a fly's eye integrator 110 1996
5910856 Integrated hybrid silicon-based micro-reflector 52 1998
6084626 Grating modulator array 83 1998
6061166 Diffractive light modulator 82 1998
6038057 Method and system for actuating electro-mechanical ribbon elements in accordance to a data stream 79 1998
6144481 Method and system for actuating electro-mechanical ribbon elements in accordance to a data stream 96 1998
6172796 Multilevel electro-mechanical grating device and a method for operating a multilevel mechanical and electro-mechanical grating device 60 1998
* 6181458 Mechanical grating device with optical coating and method of making mechanical grating device with optical coating 60 1998
6252697 Mechanical grating device 52 1998
6479811 Method and system for calibrating a diffractive grating modulator 43 2000
6384959 Optical data modulation system with self-damped electromechanical conformal grating 45 2001
 
AT&T CORP. (1)
5500761 Micromechanical modulator 354 1994
 
Sega Enterprises, Ltd. (1)
5712649 Head-mounted image display 92 1996
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
Katholieke Universiteit (1)
* 8383441 Method for manufacturing a micromachined device and the micromachined device made thereof 1 2011
 
SNAPTRACK, INC. (6)
* 7310179 Method and device for selective adjustment of hysteresis window 13 2005
* 2006/0077,520 Method and device for selective adjustment of hysteresis window 10 2005
7576901 Method and device for selective adjustment of hysteresis window 8 2007
* 2008/0106,784 METHOD AND DEVICE FOR SELECTIVE ADJUSTMENT OF HYSTERESIS WINDOW 3 2007
7952788 Method and device for selective adjustment of hysteresis window 0 2009
* 2009/0267,934 METHOD AND DEVICE FOR SELECTIVE ADJUSTMENT OF HYSTERESIS WINDOW 4 2009
 
KATHOLIEKE UNIVERSITEIT LEUVEN (1)
* 2011/0180,886 Method for Manufacturing a Micromachined Device and the Micromachined Device Made Thereof 2 2011
 
GLOBALFOUNDRIES INC. (2)
* 7417315 Negative thermal expansion system (NTEs) device for TCE compensation in elastomer composites and conductive elastomer interconnects in microelectronic packaging 3 2002
* 2004/0110,322 Negative thermal expansion system (NTEs) device for TCE compensation in elastomer composites and conductive elastomer interconnects in microelectronic packaging 4 2002
 
AXSUN TECHNOLOGIES LLC (2)
8660164 Method and system for avoiding package induced failure in swept semiconductor source 1 2012
9048614 Method and system for avoiding package induced failure in swept semiconductor source 0 2014
 
PUBLIC SERVICE SOLUTIONS, INC. (1)
9012845 Passive detectors for imaging systems 0 2012
 
RAYTHEON COMPANY (2)
* 8537552 Heat sink interface having three-dimensional tolerance compensation 0 2009
* 2011/0075,377 Heat Sink Interface Having Three-Dimensional Tolerance Compensation 6 2009
* Cited By Examiner

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