PDL mitigation structure for diffractive MEMS and gratings

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United States of America Patent

PATENT NO 6922273
SERIAL NO

10377840

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Abstract

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A modulator for modulating an incident beam of light. The modulator includes a plurality of elements, each element including a first end, a second end, a first non-linear side, a second non-linear side, and a light reflective planar surface. The light reflective planar surfaces of the plurality of elements lie in one or more parallel planes. The elements are preferably arranged parallel to each other. The modulator also includes a support structure to maintain a position of each element relative to each other and to enable movement of selective ones of the plurality of elements in a direction normal to the one or more parallel planes of the plurality of elements. The plurality of elements are preferably moved between a first modulator configuration wherein the plurality of elements act to reflect the incident beam of light as a plane mirror, and a second modulator configuration wherein the plurality of elements act to diffract the incident beam of light. The non-linear sides substantially reduce the polarization dependent losses for diffraction from the plurality of elements.

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Patent Owner(s)

Patent OwnerAddress
SILICON LIGHT MACHINES CORPORATION6660 VIA DEL ORO SAN JOSE CA 95119

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dueweke, Michael Santa Clara, CA 12 49
Maheshwari, Dinesh Fremont, CA 80 725

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