Off-axis diffractive beam shapers and splitters for reducing sensitivity to manufacturing tolerances
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United States of America Patent
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Jul 26, 2005
Issued Date -
N/A
app pub date -
Apr 19, 2004
filing date -
Jun 16, 2000
priority date (Note) -
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Abstract
A diffractive element used in conjunction with a grating to move a desired order beam off-axis, thereby reducing interference by undesired orders. Use of the off-axis grating allows a more uniform beam in the presence of manufacturing defects, such as etch depth errors. The diffractive element used with the off-axis grating may include a beam shaper, a one-dimensional beam splitter, or a two-dimensional beam splitter.
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