Pedestal for flat panel display applications

United States of America Patent

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Aug 2, 2005
Grant Date
Sep 4, 2003
app pub date
Mar 4, 2003
filing date
May 22, 2001

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Abstract

An apparatus for supporting a substrate in a processing system comprising a body and an upper top portion having a surface thereon adapted to minimize friction and/or chemical reactions between the substrate support and a substrate supported thereon.

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Patent Owner(s)

Patent Owner	Address
APPLIED MATERIALS INC	3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

F27B:FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPE....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Bagley, William A	San Jose, CA	9	1059
Ramirez, Ericka M	Gilroy, CA	2	489
Wolgast, Stephen C	Cupertino, CA	5	501

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Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

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Number of patents in all portfolios	100 (maximum)	1000 (maximum)	2000 (maximum)	Unlimited
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Number of patents in all portfolios	100 (maximum)	1000 (maximum)	2000 (maximum)	Unlimited
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Maximum number of portfolios	5 (maximum)	10 (maximum)	100 (maximum)	Unlimited
Maximum number of comparisons	1 (maximum)	5 (maximum)	20 (maximum)	Unlimited

Pedestal for flat panel display applications

Number of patents in Portfolio can not be more than 2000

United States of America Patent

10379520

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PATENT NO	6924462
APP PUB NO	20030164362A1
SERIAL NO	10379520
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
August 02, 2005	US,6924462,B2 US6924462B2	GRANTED PATENT AS SECOND PUBLICATION
September 04, 2003	US,20030164362,A1 US20030164362A1	FIRST PUBLISHED PATENT APPLICATION

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10379520

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Abstract

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Family

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