US Patent No: 6,926,584
Number of patents in Portfolio can not be more than 2000
Dual mode hybrid control and method for CMP slurry
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Aug 9, 2005
Issued date -
Oct 9, 2002
filing date -
10/267,614
serial no -
In Force
status
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Abstract
A DMHC (dual mode hybrid control) system and method which facilitates enhanced control in the delivery of polishing slurry to a CMP (chemical mechanical polishing) apparatus. The DMHC comprises a linear table and a PID (proportional integrated differential) controller operably connected to a slurry pump provided in a slurry flow conduit which delivers the polishing slurry to the CMP apparatus. A bubble trap and a flowmeter provided in the slurry flow conduit downstream of the slurry pump are operably connected to the PID controller, and the CMP apparatus is located downstream of the flowmeter.
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First Claim
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
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| 5,046,925 Gas piston liquid flow controller | 6 | 1991 | |
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| 4,767,417 Drainage device for collecting liquids from a body cavity | 25 | 1986 | |
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| 5,273,664 Apparatus and method for disinfection of water by ozone injection | 28 | 1992 | |
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| 4,966,691 Measurement and control of ultrafiltration in dialysis | 16 | 1989 | |
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