Gas generation system
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United States of America Patent
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Aug 9, 2005
Grant Date -
N/A
app pub date -
Mar 6, 2000
filing date -
Mar 4, 1999
priority date (Note) -
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Abstract
A gas generator system is provided wherein supply sources for halogenated gases, including pure molecular halogens, are connected into a gas reaction chamber, or chamber system, to enable generation of a predetermined gas for localized use in a subsequent process. The reaction chamber has a valved outlet for direct supply of the generated gas to a single or multiple chamber processing tool or process chamber. Thus it is possible, for example, to provide for the localized generation of reactive process gases.
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