Chlorotrifuorine gas generator system
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United States of America Patent
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Aug 16, 2005
Grant Date -
N/A
app pub date -
Mar 6, 2000
filing date -
Mar 4, 1999
priority date (Note) -
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Abstract
A ClF3 gas generation system is provided with supply sources of chlorine (3) (for example a cylinder of compressed chlorine) and fluorine (4) (for example a fluorine generator) connected into a gas reaction chamber (2) enabling generation of ClF3 gas. The reaction chamber has a valved outlet (C) for the supply of the ClF3 gas to a process chamber for immediate local use.
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