Method and apparatus for irradiation of active energy beam
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United States of America Patent
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Aug 16, 2005
Grant Date -
Sep 16, 2004
app pub date -
Mar 5, 2004
filing date -
Oct 12, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A target object to be irradiated is transported into an irradiating chamber through a transport inlet for irradiation with an active energy beam under an inert gas atmosphere in an active energy beam irradiating section included in the irradiating chamber and, then is transported out of the irradiating chamber. When the object is subject to above steps, the gas flow resistance at the transport outlet is controlled such that the active energy beam irradiation is carried out under the condition of X/Y≧1, where X represents the gas amount passing through the transport inlet, and Y represents the gas amount passing through the transport outlet.
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