Semiconductor device and method of manufacturing the same

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United States of America Patent

PATENT NO 6930382
SERIAL NO

10875190

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Abstract

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A semiconductor device includes a first substrate including an element, a first plug penetrating through the first substrate, made of a conductive material, and electrically connected with the element, a second substrate provided above the first substrate, and electrically connected with the element via the first plug, and a second plug penetrating through the first substrate, made of a non-dielectric material, and being not electrically connected with the second substrate.

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Patent Owner(s)

  • TOSHIBA MEMORY CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sasaki, Keiichi Yokohama, JP 63 870
Sawada, Kanako Yokohama, JP 12 273

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