Polishing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 23, 2005
Grant Date -
Jul 10, 2003
app pub date -
Jan 9, 2003
filing date -
Jan 9, 2002
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A polishing apparatus includes a polishing jig. The polishing jig includes an elastic balloon member, a fixture, and a fluid supply portion. The fixture airtightly closes the rear opening portion of the balloon member. The fluid supply portion supplies a fluid into a space formed by the fixture and balloon member. The balloon member has a cup shape constructed by a dome portion and a cylinder portion extending backward from the outer periphery of the dome portion. The fixture fixes the opening portion of the cylinder portion of the balloon member.
First Claim
Family
International Classification(s)
Cited Art Landscape
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