Prober
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Aug 23, 2005
Grant Date -
Aug 26, 2004
app pub date -
Jan 8, 2003
filing date -
Jan 30, 2002
priority date (Note) -
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status (Latency Note)
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Abstract
This invention is a probe apparatus including: a stage onto which a substrate to be processed is placed, a semiconductor device having a plurality of groups of electrode pads being formed on the substrate to be processed; a probe-card holding mechanism that holds a probe card provided with a group of probe needles corresponding to each group of electrode pads; and a driving mechanism that moves the stage and causes the group of probe needles to successively come in contact with the respective groups of electrode pads. A converting device that converts mechanical vibration energy generated in components of the probe apparatus into electrical energy, and an electrical circuit that discreates an electrical current based on the electric energy converted by the converting device are further provided.
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