Small-beam lateral-shear interferometer
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United States of America Patent
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Aug 30, 2005
Grant Date -
Mar 18, 2004
app pub date -
Sep 18, 2002
filing date -
Sep 18, 2002
priority date (Note) -
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Abstract
A lateral-shear interferometer utilizes two relatively thick glass plates bonded together in a single block with a tilted air gap between opposing inner surfaces. The thickness of the glass plates is selected to be sufficiently large to separate the output beams from the light reflected from the top and bottom surfaces of the block, thereby eliminating the need for antireflection coatings. The shear interferometer is combined with an external mirror mounted on a tilt stage actuated by a computer-controlled tilt actuator to perform phase-shifting interferometric analysis in conventional manner.
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