Vertical displacement device
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United States of America Patent
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-
Sep 6, 2005
Grant Date -
Nov 4, 2004
app pub date -
Apr 29, 2004
filing date -
May 1, 2003
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A MEMS vertical displacement device capable of moving one or more vertically displaceable platforms relative to a base. In particular, the vertical displacement device may be capable of moving a vertically displaceable platform so that the vertically displaceable platform remains generally parallel to a base. The vertically displaceable platform may be, but is not limited to, a microlens, a micromirror, micro-grating, or other device. The vertical displacement device may also be included in optical coherence and confocal imaging systems.
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